{"id":25674,"date":"2018-10-01T17:24:42","date_gmt":"2018-10-01T15:24:42","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=25674"},"modified":"2024-07-16T15:00:15","modified_gmt":"2024-07-16T13:00:15","slug":"nano-device-characterization","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode\/nano-device-characterization","title":{"rendered":"Nano-Device Characterization"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_submenu  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_42_1rzc5xpifl6sg\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"bgposition:50% 50%;duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : ANODE<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"bgposition:50% 50%;duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/sliders_groupe_anode-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : ANODE<\/ls-layer><\/div><\/div><\/div>\n<div id='sub_menu1'  class='av-submenu-container av-jrqfadqy-ce2f2ab09b07c9cd48b0b2cdd423b7d9 footer_color  avia-builder-el-1  el_after_av_layerslider  el_before_av_heading  submenu-not-first container_wrap sidebar_right' style='z-index:301' ><div class='container av-menu-mobile-disabled av-submenu-pos-left'><ul id='av-custom-submenu-1' class='av-subnav-menu' role='menu'><li class='menu-item av-2nzbzl4-dd30c1a64892c4ee2e87157aeb7be687 menu-item-top-level menu-item-top-level-1' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Introduction<\/span><\/a><\/li><li class='menu-item av-2ae1ync-b4ed92654495626754e5d1f77699bf33 menu-item-top-level menu-item-top-level-2' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode\/team-members'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Members<\/span><\/a><\/li><li class='menu-item av-1l5r25k-a6582f398e52e6499c6ec8b0e2214b82 menu-item-top-level menu-item-top-level-3' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode\/solid-state-thz-electronic-activities'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Solid State THz - Electronic activities<\/span><\/a><\/li><li class='menu-item av-yr0pgo-286fde3b578cabc174447cd3c87ea6ad menu-item-top-level menu-item-top-level-4' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode\/ultra-low-power-biomimetic-sensors'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Ultra Low Power Biomimetic Sensors<\/span><\/a><\/li><li class='menu-item av-vk8c14-3df87ecbbd9f0f3cf0410e55c33041b1 menu-item-top-level menu-item-top-level-5' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/groupe-anode\/nano-device-characterization'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Nano-Device Characterization<\/span><\/a><\/li><li class='menu-item av-md0qui-4c7f1bb90e4f174354c189402575b217 menu-item-top-level menu-item-top-level-6' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Other groups<\/span><\/a><\/li><\/ul><\/div><\/div><div id='after_submenu_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-25674'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jrs1qoaw-2839bdd477d090e1d7b6b37909e4280c\">\n#top .av-special-heading.av-jrs1qoaw-2839bdd477d090e1d7b6b37909e4280c{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jrs1qoaw-2839bdd477d090e1d7b6b37909e4280c .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jrs1qoaw-2839bdd477d090e1d7b6b37909e4280c .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jrs1qoaw-2839bdd477d090e1d7b6b37909e4280c av-special-heading-h2  avia-builder-el-2  el_after_av_submenu  el_before_av_textblock  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >Nano-Device Characterization<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<section  class='av_textblock_section av-jmqg6k6u-c6493d2ac103c7051c3e0c2fddeb866d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>This activity aims to develop a new generation of instrumentation to address on-wafer measurement of nano-devices in the microwave regime.<\/p>\n<h4>Micro-probing tools for high frequency measurement of Nano-devices<\/h4>\n<p>This activity aims to develop a new generation of instrumentation to address on-wafer measurement of nano-devices in the microwave regime. The system consists of a scanning electron microscope equipped with XYZ nano-positioners and micro-electromechanical systems (MEMS) technology-based miniaturized microwave ground-signal-ground (GSG) probes. The probe structure is designed using coplanar technology on a micrometer scale. In contrast to conventional macroscopic on-wafer probing structures, a 2\u03bcm width signal line and 2.5\u03bcm width spacing between signal and ground conductors are achieved (Fig. 11). The micro-cantilever-based probe structure is optimized to ensure good radio frequency (RF) performances. The fabrication steps of the probe structures have been developed by means of MEMS technologies using silicon-on-insulator (SOI) wafers. This activity started with EQPX ExCELSiOR project (Nov.2012 - Dec.2019) and followed by European PlanarCal project (Nov. 2015-Oct. 2018).This federative work is performed in collaboration with several key actors and groups at IEMN, particularly CSAM, NAM6 groups.<\/p>\n<div id=\"attachment_25675\" style=\"width: 735px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25675\" class=\"wp-image-25675\" title=\"Fig. 11 : On-wafer micrometer pitch probing set-up\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer.jpg\" alt=\"Fig. 11 : On-wafer micrometer pitch probing set-up\" width=\"725\" height=\"270\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer.jpg 771w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer-300x112.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer-768x286.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/10\/anode_-fig11_micrometer-705x262.jpg 705w\" sizes=\"auto, (max-width: 725px) 100vw, 725px\" \/><\/a><p id=\"caption-attachment-25675\" class=\"wp-caption-text\">Fig. 11 : On-wafer micrometer pitch probing set-up<\/p><\/div>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":25623,"menu_order":20,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-25674","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/25674","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=25674"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/25674\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/25623"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=25674"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}