{"id":24754,"date":"2018-09-18T11:44:36","date_gmt":"2018-09-18T09:44:36","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=24754"},"modified":"2025-05-16T10:58:38","modified_gmt":"2025-05-16T08:58:38","slug":"equipment","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/equipment","title":{"rendered":"Equipment"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_submenu  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_17_2so59taljn9h\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"bgposition:50% 50%;duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy_four1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : EPIPHY<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/04\/sliders_epiphy-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : EPIPHY<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2017\/04\/sliders_page-daccueil1_7.gif\" class=\"ls-bg\" alt=\"\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : EPIPHY<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_groupe_epiphy4-2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:320px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>GROUPE DE RECHERCHE : EPIPHY<\/ls-layer><\/div><\/div><\/div>\n<div id='sub_menu1'  class='av-submenu-container av-jrqfadqy-ce2f2ab09b07c9cd48b0b2cdd423b7d9 footer_color  avia-builder-el-1  el_after_av_layerslider  el_before_av_heading  submenu-not-first container_wrap sidebar_right' style='z-index:301' ><div class='container av-menu-mobile-disabled av-submenu-pos-left'><ul id='av-custom-submenu-1' class='av-subnav-menu' role='menu'>\n<li class='menu-item av-3l1pwfm-9b5f093e174ce6c008eb1835d47f6296 menu-item-top-level menu-item-top-level-1' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Introduction<\/span><\/a><\/li>\n<li class='menu-item av-2xndtrm-5e88d7deddfeb567a64a1ae700ffc62d menu-item-top-level menu-item-top-level-2' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/members'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Team members<\/span><\/a><\/li>\n<li class='menu-item av-2qa0xg2-7ab64004dcc0e2b6a1feff14f2bbb463 menu-item-top-level menu-item-top-level-3' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/masters-phds'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Masters - PhDs<\/span><\/a><\/li>\n<li class='menu-item av-1pmdn3m-43327db6d6c89d594f50c4876c045b24 menu-item-top-level menu-item-top-level-4' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/on-going-studies'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>On-going studies<\/span><\/a><\/li>\n<li class='menu-item av-15zujiq-fc18fedd5b85d4dad3489b08f123cdc4 menu-item-top-level menu-item-top-level-5' role='menuitem'><a href=''  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Publications<\/span><\/a><\/li>\n<li class='menu-item av-sa5wpe-6d6c523f85a5d7c82cc9e0e735330299 menu-item-top-level menu-item-top-level-6' role='menuitem'><a href='https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes'  ><span class='avia-bullet'><\/span><span class='avia-menu-text'>Other groups<\/span><\/a><\/li>\n<\/ul><\/div><\/div><div id='after_submenu_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-24754'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-447bki-9e0ab0e3dbbb88a0c131c9967f7f0923\">\n#top .av-special-heading.av-447bki-9e0ab0e3dbbb88a0c131c9967f7f0923{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-447bki-9e0ab0e3dbbb88a0c131c9967f7f0923 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-447bki-9e0ab0e3dbbb88a0c131c9967f7f0923 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-447bki-9e0ab0e3dbbb88a0c131c9967f7f0923 av-special-heading-h2  avia-builder-el-2  el_after_av_submenu  el_before_av_textblock  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >EPIPHY Group : Equipment<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<section  class='av_textblock_section av-jm7ja422-92e581a5002f7b17c9e10d852209fccb'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>Three molecular beam epitaxy (MBE) chambers<\/strong> are running at IEMN. One is dedicated to III-V material growth, one to transition metal dichalcogenide studies. Both are <strong>coupled together with the ESCA analysis chamber<\/strong> under ultra-high-vacuum. The third one is concerned with graphene\/hBN growth experiments. <strong>Two chemical vapor deposition systems<\/strong> are also available, dedicated either to the growth of Si and Ge nanowires or to graphene on metals.<\/p>\n<p><strong>Numerous characterization tools<\/strong> are also available, to give information about structural (X-ray diffractometer, atomic force microscope and scanning electron microscope), surface (ESCA), electrical (Hall effect) and optical properties (micro-photoluminescence and Raman), as well as two coupled thermogravimetry and mass spectroscopy analysis tools.<\/p>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2017\/01\/LogoRENATECH-1.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-31098\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2017\/01\/LogoRENATECH-1.png\" alt=\"\" width=\"194\" height=\"80\" \/><\/a>All these equipments are part of <a href=\"https:\/\/www.renatech.org\/en\/\" target=\"_blank\" rel=\"noopener\">Renatech<\/a>, the french network of high-end facilities in the field of micro &amp; nanotechnologies. They might be used to carry out research, by academia or industrial partners, national r international.<\/p>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-134wp0y-7d8b9ef423c1c65e9f5725244dcac4b4\">\n.flex_column.av-134wp0y-7d8b9ef423c1c65e9f5725244dcac4b4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-134wp0y-7d8b9ef423c1c65e9f5725244dcac4b4 av_one_full  avia-builder-el-4  el_after_av_textblock  el_before_av_one_full  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jm7js08y-dd7d9199d43f7f72d70b58697f07e88a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Growth<\/h4>\n<\/div><\/section><br \/>\n<div  class='togglecontainer av-jm7jrgtd-95c74c84ed68c0190d897c45dd9a8782  avia-builder-el-6  el_after_av_textblock  avia-builder-el-last  toggle_close_all' >\n<section class='av_toggle_section av-va5xua-622dd11900ae0266a2917a1d4f77f85c'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-1' data-fake-id='#toggle-id-1' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-1' data-slide-speed=\"200\" data-title=\"III-V epitaxy\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: III-V epitaxy\" data-aria_expanded=\"Click to collapse: III-V epitaxy\">III-V epitaxy<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-1' aria-labelledby='toggle-toggle-id-1' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><p>A RIBER Compact 21 TM system, dedicated to the growth of III-V materials (Arsenides, Antimonides and Phosphides), is equipped with the following sources:<\/p>\n<ul>\n<li>III-element sources: Gallium, Aluminum, Indium<\/li>\n<li>V-element gas sources: Arsine and Phosphine with mass flow regulation and high temperature injector<\/li>\n<li>V-element solid sources: valved Arsenic cracker (Riber VAC500) and valved antimony cracker (VEECO Sb-200)<\/li>\n<li>Dopants: Silicon, Beryllium, Tellurium (GaTe) and Carbon (low temperature CBr<sub>4<\/sub> injector)<\/li>\n<li>Atomic Hydrogen source: ADDON RF plasma cell<\/li>\n<\/ul>\n<p>The system is cooled down with liquid nitrogen using a Vacuum Barrier set-up. Pumping is carried out thanks to a CTI OB250F cryo-pump and a 400l\/s ion-pump.<\/p>\n<p>In situ analysis can be performed thanks to the following tools:<\/p>\n<ul>\n<li>RHEED Staib 35kV (EK2035 type).<\/li>\n<li>a KSA system for RHEED image acquisition and treatment.<\/li>\n<li>a Hiden HALO 201 LC system for residual gas analysis<\/li>\n<li>an optical pyrometer together with a KSA BandiT optical absorption spectrum analysis for wafer temperature measurement.<\/li>\n<\/ul>\n<p>This MBE system allows the growth of high quality III-V semiconductor thin films, 2D heterostructures for electronic and optoelectronic device fabrication and also of self-organised quantum nanostructures (quantum dots) or selectively obtained with respect to a nanostructured dielectric mask. The ultra-high vacuum environment and the wide variety of dopants ensure a very good control of the transport properties in the epitaxial layers.<\/p>\n<p>This system is coupled under ultra-high vacuum to an XPS analysis chamber.<\/p>\n<p><div id=\"attachment_37830\" style=\"width: 289px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-pump-side-1.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-37830\" class=\"wp-image-37830\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-pump-side-1.jpg\" alt=\"III-V MBE Riber compact 21 reactor, pump side\" width=\"279\" height=\"1342\" \/><\/a><p id=\"caption-attachment-37830\" class=\"wp-caption-text\">III-V MBE Riber compact 21 reactor, pump side<\/p><\/div><br \/>\n<div id=\"attachment_37828\" style=\"width: 289px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-37828\" class=\"wp-image-37828\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1.jpg\" alt=\"III-V MBE Riber compact 21 reactor, view from the manipulator side\" width=\"279\" height=\"412\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1.jpg 1984w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1-204x300.jpg 204w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1-768x1132.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1-699x1030.jpg 699w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1-1018x1500.jpg 1018w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/09\/MBE-reactor-manipulator-side-1-478x705.jpg 478w\" sizes=\"auto, (max-width: 279px) 100vw, 279px\" \/><\/a><p id=\"caption-attachment-37828\" class=\"wp-caption-text\">III-V MBE Riber compact 21 reactor, view from the manipulator side<\/p><\/div><\/p>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-l1kh82-f6b1fa633890b9faee60ce0b8e7f3bea'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-2' data-fake-id='#toggle-id-2' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-2' data-slide-speed=\"200\" data-title=\"Graphene\/hBN epitaxy\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Graphene\/hBN epitaxy\" data-aria_expanded=\"Click to collapse: Graphene\/hBN epitaxy\">Graphene\/hBN epitaxy<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-2' aria-labelledby='toggle-toggle-id-2' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><p>The graphene epitaxy chamber is dedicated to the growth of the 2D materials graphene and hBN under ultra high vacuum (UHV). It is scheduled to study the elaboration of heterostructures made of these two materials. It is based on a modified RIBER COMPACT 21 chamber, fitted with the following equipments:<\/p>\n<ul>\n<li>a 3 in. rotatable substrate holder<\/li>\n<li>a 2 in. graphite heater which allow growth up to temperatures of 1800 K<\/li>\n<li>a carbon high temperature cell with a graphite filament (MBE-Komponenten)<\/li>\n<li>a low-flux silicon effusion cell (Riber)<\/li>\n<li>a high-flux silicon filament cell (MBE-Komponenten)<\/li>\n<li>a RF plasma nitrogen source (Riber)<\/li>\n<li>a high temperature effusion cell for boron (MBE-Komponenten)<\/li>\n<li>a high temperature gas injector for borazine B<sub>3<\/sub>N<sub>3<\/sub>H<sub>6<\/sub> (Riber)<\/li>\n<li>a quadrupole mass spectrometer (Hiden Halo 201 RC) with electron energy control<\/li>\n<li>a reflected high-energy electron diffraction (RHEED) system from Staib (15S)<\/li>\n<li>temperature measurement by AOIP optical pyrometer<\/li>\n<li>flux measurements by retractable Inficon quartz balance<\/li>\n<\/ul>\n<p>An UHV analysis chamber is connected to the growth chamber. It includes a Spectaleed LEED\/Auger system from Omicron.<\/p>\n<p><div id=\"attachment_25467\" style=\"width: 958px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25467\" class=\"wp-image-25467 size-full\" title=\"The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, an overview.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018.jpg\" alt=\"The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, an overview.\" width=\"948\" height=\"632\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018.jpg 948w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018-300x200.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018-768x512.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_epitaxy2018-705x470.jpg 705w\" sizes=\"auto, (max-width: 948px) 100vw, 948px\" \/><\/a><p id=\"caption-attachment-25467\" class=\"wp-caption-text\">The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, an overview.<\/p><\/div><br \/>\n<div id=\"attachment_24777\" style=\"width: 607px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_hbn_epitaxy2.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24777\" class=\"wp-image-24777 size-full\" title=\"The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, detailed view of the growth chamber.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_hbn_epitaxy2.jpg\" alt=\"The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, detailed view of the growth chamber.\" width=\"597\" height=\"632\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_hbn_epitaxy2.jpg 597w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_hbn_epitaxy2-283x300.jpg 283w\" sizes=\"auto, (max-width: 597px) 100vw, 597px\" \/><\/a><p id=\"caption-attachment-24777\" class=\"wp-caption-text\">The Riber Compact 21 MBE chamber dedicated to graphene\/hBN epitaxy, detailed view of the growth chamber.<\/p><\/div><\/p>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-29ehhu-290a015ca202258b88f3c452cb47ff76'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-3' data-fake-id='#toggle-id-3' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-3' data-slide-speed=\"200\" data-title=\"Graphene CVD\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Graphene CVD\" data-aria_expanded=\"Click to collapse: Graphene CVD\">Graphene CVD<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-3' aria-labelledby='toggle-toggle-id-3' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><p>A chemical vapor deposition system is available, to study the catalysed growth of graphene on metallic substrates (films or foils of Cu, Ni...). It is based on a rapid thermal annealing setup JetFirst made by Jipelec, which includes the following parts:<\/p>\n<ul>\n<li>dry &amp; turbomolecular pumping<\/li>\n<li>butterfly valve pressure regulation<\/li>\n<li>source gases CH<sub>4<\/sub>, H<sub>2<\/sub> &amp; Ar<\/li>\n<li>temperature measurement by optical pyrometry or thermocouples<\/li>\n<\/ul>\n<p><div id=\"attachment_25211\" style=\"width: 578px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25211\" class=\"wp-image-25211\" title=\"Jetfirst setup: whole system\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT.jpg\" alt=\"\" width=\"568\" height=\"372\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT.jpg 1839w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT-300x197.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT-768x504.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT-1030x675.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT-1500x984.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_MT-705x462.jpg 705w\" sizes=\"auto, (max-width: 568px) 100vw, 568px\" \/><\/a><p id=\"caption-attachment-25211\" class=\"wp-caption-text\">Jetfirst setup: whole system<\/p><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-sr0h4i-df88d09aceacf583db786ff453b3f883\">\n#top .hr.hr-invisible.av-sr0h4i-df88d09aceacf583db786ff453b3f883{\nheight:10px;\n}\n<\/style>\n<div  class='hr av-sr0h4i-df88d09aceacf583db786ff453b3f883 hr-invisible  avia-builder-el-7  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p>\n<h4>Graphene growth by CVD<\/h4>\n<p>The following figure shows as example the optimisation of the growth parameters to reduce the coverage by graphene bi- or multi-layers on Cu foils. This study was carried out during the GRACY ANR project (\"Graphene for circuits and systems\", coordinated by H. Happy, IEMN).<\/p>\n<div id=\"attachment_24768\" style=\"width: 1715px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3.png\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24768\" class=\"wp-image-24768 size-full\" title=\"Optimisation of the graphene CVD process on Cu foils (inset scale bars are 2 \u00b5m). Monolayer (respectively bilayer) areas are shown by white (red) arrows, from Deokar et al. Carbon 89, 82 (2015).\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3.png\" alt=\"Optimisation of the graphene CVD process on Cu foils (inset scale bars are 2 \u00b5m). Monolayer (respectively bilayer) areas are shown by white (red) arrows, from Deokar et al. Carbon 89, 82 (2015).\" width=\"1705\" height=\"378\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3.png 1705w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3-300x67.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3-768x170.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3-1030x228.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3-1500x333.png 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/graphene_cvd_3-705x156.png 705w\" sizes=\"auto, (max-width: 1705px) 100vw, 1705px\" \/><\/a><p id=\"caption-attachment-24768\" class=\"wp-caption-text\">Optimisation of the graphene CVD process on Cu foils (inset scale bars are 2 \u00b5m). Monolayer (respectively bilayer) areas are shown by white (red) arrows, from Deokar et al. Carbon 89, 82 (2015).<\/p><\/div>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-phhib6-8e2768214cff9f73d091d017fd6deace'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-4' data-fake-id='#toggle-id-4' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-4' data-slide-speed=\"200\" data-title=\"Transition metal dichalcogenide epitaxy\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Transition metal dichalcogenide epitaxy\" data-aria_expanded=\"Click to collapse: Transition metal dichalcogenide epitaxy\">Transition metal dichalcogenide epitaxy<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-4' aria-labelledby='toggle-toggle-id-4' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><div id=\"attachment_43266\" style=\"width: 232px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-43266\" class=\"wp-image-43266\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-150x300.jpg\" alt=\"\" width=\"222\" height=\"444\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-150x300.jpg 150w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-515x1030.jpg 515w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-768x1536.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-6x12.jpg 6w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-750x1500.jpg 750w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy-353x705.jpg 353w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2020\/11\/Image-equipement-Epiphy.jpg 861w\" sizes=\"auto, (max-width: 222px) 100vw, 222px\" \/><\/a><p id=\"caption-attachment-43266\" class=\"wp-caption-text\">TMDC MBE Vinci Technologies reactor<\/p><\/div>\n<p>A VINCI Technologies system, dedicated to the growth of transition metal dichalcogenides (TMDC) (Se-based), is equipped with the following sources:<\/p>\n<p>- metal sources evaporated by an UHV electron gun: Tantalum, Tungsten, Molybdenum, hafnium, Niobium, Zirconium<br \/>\n- a Selenium effusion cell<br \/>\n- a Selenium valve cracker cell<br \/>\n- Gallium and Indium effusion cells<\/p>\n<p>The system is cooled down with liquid nitrogen using a Vacuum Barrier set-up. Pumping is carried out thanks to a CTI CT8 cryo-pump and a 400l\/s ion-pump.<\/p>\n<p>In situ analysis can be performed thanks to the following tools:<br \/>\n- A RHEED Staib 15kV<br \/>\n- a KSA system for RHEED image acquisition and treatment.<br \/>\n- a Hiden HALO 201 LC system for residual gas analysis<br \/>\n- an optical pyrometer together with a KSA BandiT optical absorption spectrum analysis for wafer temperature measurement.<\/p>\n<p>This system is coupled under ultra-high vacuum to an XPS analysis chamber and to a III-V MBE reactor.<\/p>\n<\/div><\/div><\/div><\/section>\n<\/div><\/p><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-iy0kk2-bffb52d1a549ea64ffa0fecf2a9be131\">\n.flex_column.av-iy0kk2-bffb52d1a549ea64ffa0fecf2a9be131{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-iy0kk2-bffb52d1a549ea64ffa0fecf2a9be131 av_one_full  avia-builder-el-8  el_after_av_one_full  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jm7nuc6g-0cab3784167625fcfbb6f87fe9e84aed'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Characterisation<\/h4>\n<\/div><\/section><br \/>\n<div  class='togglecontainer av-maqkfux1-646160a250e031fe0f361d7aa9723722  avia-builder-el-10  el_after_av_textblock  avia-builder-el-last  toggle_close_all' >\n<section class='av_toggle_section av-av_toggle-67b23cd0fc83f507965a03c5b79d9324'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-5' data-fake-id='#toggle-id-5' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-5' data-slide-speed=\"200\" data-title=\"X-ray diffraction\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: X-ray diffraction\" data-aria_expanded=\"Click to collapse: X-ray diffraction\">X-ray diffraction<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-5' aria-labelledby='toggle-toggle-id-5' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><div id=\"attachment_25189\" style=\"width: 501px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25189\" class=\"wp-image-25189\" title=\"Figure 1: X-ray diffraction setup\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1.jpg\" alt=\"\" width=\"491\" height=\"325\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1.jpg 800w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1-300x199.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1-768x509.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/xper-1-705x467.jpg 705w\" sizes=\"auto, (max-width: 491px) 100vw, 491px\" \/><\/a><p id=\"caption-attachment-25189\" class=\"wp-caption-text\">Figure 1: X-ray diffraction setup<\/p><\/div>\n<h4>Equipment<\/h4>\n<p>The X'Pert Pro diffractometer is a triple X-ray diffraction system. The X-ray beam produced by a Cu source is filtered by a hybrid 4-bounce monochromator working either in line or point focus, to filter the K\u03b11 (1.54 \u00c5) line at low divergence (\u03b4\u03b8=12\u2033 with Ge 220 configuration). The diffracted beam can be recorded either in double-crystal configuration or using a three-bounce monochromator (3rd axis) before detection by a proportional detector. A dedicated sample holder allows grazing incidence diffraction experiments. This system is PC controlled and experimental results can be compared with simulations using the EPITAXY\u2122 software. It is used for non-destructive control of samples, with diameter up to 100 mm.<\/p>\n<h4>Experiments<\/h4>\n<p>The applications are strongly linked to III-V semiconductor epitaxy for:<\/p>\n<ul>\n<li>alloy layer composition and thickness<\/li>\n<li>epitaxial layers lattice matching to the substrate<\/li>\n<li>superlattice interface quality<\/li>\n<li>thin layer strain determination<\/li>\n<li>relaxation rate and tilt of thick mismatched layers<\/li>\n<\/ul>\n<h4>Example: analysis of thin epitaxial Sb-based layers grown on GaAs substrate<\/h4>\n<p>Thanks to the high electron mobility of InAs and InSb, their small band gaps and their strong spin-orbit coupling, '6.1 \u00c5' materials are very appealing for a number of applications in high-frequency microelectronics, mid-infrared optoelectronics and quantum technology. However, these materials suffer from the lack of lattice-matched, semi-insulating substrate, and metamorphic growth on GaAs or InP is often used for practical applications. In this case, numerous studies show strain relaxation of Sb-based III-V semiconductors grown on GaAs occurs via the formation of a Lomer dislocation array at the substrate \/epilayer interface leading to a nearly fully relaxed layer. Nevertheless the threading dislocation density in the top layers remains rather high, strongly depending on the initial stages of the relaxation process. That is why we have investigated the relaxation of thin Sb-based layers and characterized their in-plane relaxation by grazing-incidence X-ray diffraction. On the spectra in figure 2, the angular spacing between the (220) reflexion of the GaAs substrate and that of the epilayer gives access to the in-plane lattice relaxation.<\/p>\n<div id=\"attachment_24824\" style=\"width: 680px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/x_ray_diffraction.png\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24824\" class=\"wp-image-24824 size-full\" title=\"Figure 2: Grazing incidence X-ray diffraction spectra recorded after the growth of 16 AlSb or AlInSb monolayers on GaAs.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/x_ray_diffraction.png\" alt=\"Figure 2: Grazing incidence X-ray diffraction spectra recorded after the growth of 16 AlSb or AlInSb monolayers on GaAs.\" width=\"670\" height=\"455\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/x_ray_diffraction.png 670w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/x_ray_diffraction-300x204.png 300w\" sizes=\"auto, (max-width: 670px) 100vw, 670px\" \/><\/a><p id=\"caption-attachment-24824\" class=\"wp-caption-text\">Figure 2: Grazing incidence X-ray diffraction spectra recorded after the growth of 16 AlSb or AlInSb monolayers on GaAs.<\/p><\/div>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-av_toggle-ad450e6b789c2069f87d7ac4d5f22c17'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-6' data-fake-id='#toggle-id-6' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-6' data-slide-speed=\"200\" data-title=\"Micro-Photoluminescence &amp; Raman\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Micro-Photoluminescence &amp; Raman\" data-aria_expanded=\"Click to collapse: Micro-Photoluminescence &amp; Raman\">Micro-Photoluminescence &amp; Raman<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-6' aria-labelledby='toggle-toggle-id-6' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><p>The micro-photoluminescence set-up is built around a LabRAM HR confocal system from Horiba Jobin-Yvon. It allows micro-luminescence measurements on low to large band gap materials, from low to<\/p>\n<p>room temperature It is also used for Raman spectroscopy. Here are the main characteristics :<\/p>\n<ul>\n<li>\u00a00.473 \u00b5m laser source<\/li>\n<li>\u00a0f=800 mm monochromator<\/li>\n<li>\u00a0CCD camera detection (0.3-1.06 \u00b5m)<\/li>\n<li>InGaAs single-channel detectors, cooled or not (0.9 to 2.2 \u00b5m)<\/li>\n<li>liquid nitrogen cooled InSb single-channel detector (1 to 5.5 \u00b5m)<\/li>\n<li>closed-cycle cryostat for microscopy Cryo Ind. (12 to 300 K)<\/li>\n<\/ul>\n<p><div id=\"attachment_25405\" style=\"width: 469px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25405\" class=\"wp-image-25405\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl.jpg\" alt=\"\" width=\"459\" height=\"276\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl.jpg 819w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl-300x180.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl-768x461.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/characterisation_micro_pl-705x424.jpg 705w\" sizes=\"auto, (max-width: 459px) 100vw, 459px\" \/><\/a><p id=\"caption-attachment-25405\" class=\"wp-caption-text\">The micro-photoluminescence set-up (where the cryostat is seen front left, on its micro-positionning table).<\/p><\/div><br \/>\n<div id=\"attachment_24829\" style=\"width: 270px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence2.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24829\" class=\"wp-image-24829 size-full\" title=\"Close-view of the microscope cryostat and coupling with the LabRAM HR.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence2.jpg\" alt=\"Close-view of the microscope cryostat and coupling with the LabRAM HR.\" width=\"260\" height=\"366\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence2.jpg 260w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence2-213x300.jpg 213w\" sizes=\"auto, (max-width: 260px) 100vw, 260px\" \/><\/a><p id=\"caption-attachment-24829\" class=\"wp-caption-text\">Close-view of the microscope cryostat and coupling with the LabRAM HR.<\/p><\/div><br \/>\n<div id=\"attachment_24831\" style=\"width: 397px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence3.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24831\" class=\"wp-image-24831 size-full\" title=\"Example of Raman measurements: integrated intensity ratio map of CVD graphene after transfer on SiO2\/Si (top), and Raman spectra of the circled area (bottom) (from Deokar et al., Carbon (2015) 89, 82).\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence3.jpg\" alt=\"Example of Raman measurements: integrated intensity ratio map of CVD graphene after transfer on SiO2\/Si (top), and Raman spectra of the circled area (bottom) (from Deokar et al., Carbon (2015) 89, 82).\" width=\"387\" height=\"446\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence3.jpg 387w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/micro_photoluminescence3-260x300.jpg 260w\" sizes=\"auto, (max-width: 387px) 100vw, 387px\" \/><\/a><p id=\"caption-attachment-24831\" class=\"wp-caption-text\">Example of Raman measurements: integrated intensity ratio map of CVD graphene after transfer on SiO2\/Si (top), and Raman spectra of the circled area (bottom) (from Deokar et al., Carbon (2015) 89, 82).<\/p><\/div><\/p>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-av_toggle-98095825e9a80ea920f0c9f93a2c1417'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-7' data-fake-id='#toggle-id-7' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-7' data-slide-speed=\"200\" data-title=\"Hall effect\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Hall effect\" data-aria_expanded=\"Click to collapse: Hall effect\">Hall effect<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-7' aria-labelledby='toggle-toggle-id-7' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><div id=\"attachment_24840\" style=\"width: 351px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/hall_effect_six_probe.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24840\" class=\"wp-image-24840 size-full\" title=\"Detail of the six probe assembly.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/hall_effect_six_probe.jpg\" alt=\"Detail of the six probe assembly.\" width=\"341\" height=\"158\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/hall_effect_six_probe.jpg 341w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/hall_effect_six_probe-300x139.jpg 300w\" sizes=\"auto, (max-width: 341px) 100vw, 341px\" \/><\/a><p id=\"caption-attachment-24840\" class=\"wp-caption-text\">Detail of the six probe assembly.<\/p><\/div>\n<p>The HL 5500 PC system allows Hall effect measurements at room temperature, at liquid nitrogen temperature (77K) or by heating up to 600\u00b0C under controlled atmosphere. Six probes are used to contact the van der Pauw geometry or Hall bar samples so as to determine the sheet resistance of the layers. The sheet carrier density and their mobility are measured by Hall effect with a 0.32 Tesla permanent magnetic field.<\/p>\n<h4>Main applications:<\/h4>\n<p>- calibration of doping, n type and p type<\/p>\n<p>- residual doping determination<\/p>\n<p>- properties of two dimensional electron gas in HEMT structures<\/p>\n<p>&#8211; &#8230;<\/p>\n<div id=\"attachment_25204\" style=\"width: 4938px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25204\" class=\"wp-image-25204 size-full\" title=\"The Hall effect set-up.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084.jpg\" alt=\"\" width=\"4928\" height=\"3264\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084.jpg 4928w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084-300x199.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084-768x509.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084-1030x682.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084-1500x994.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/DSC4084-705x467.jpg 705w\" sizes=\"auto, (max-width: 4928px) 100vw, 4928px\" \/><\/a><p id=\"caption-attachment-25204\" class=\"wp-caption-text\">The Hall effect set-up.<\/p><\/div>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-av_toggle-8dee78937b85bea1a95510205f45b556'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-8' data-fake-id='#toggle-id-8' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-8' data-slide-speed=\"200\" data-title=\"Electron Spectroscopy for Chemical Analysis (ESCA)\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Electron Spectroscopy for Chemical Analysis (ESCA)\" data-aria_expanded=\"Click to collapse: Electron Spectroscopy for Chemical Analysis (ESCA)\">Electron Spectroscopy for Chemical Analysis (ESCA)<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-8' aria-labelledby='toggle-toggle-id-8' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><h4>Equipment<\/h4>\n<p>The surface analysis system is connected to 2 molecular beam epitaxy chambers under ultra-high vacuum and to an introduction chamber, which allows the analysis of any sample. Based on a 5600 Physical Electronics system, the set-up has been adapted to work on 3-inch MBE sample holders. The main parts are:<\/p>\n<ul>\n<li>sample manipulator with 3 translations and 2 rotations (polar and azimuth)<\/li>\n<li>150 mm radius hemispherical analyser<\/li>\n<li>X-ray dual anode Zr(2042eV)\/Mg(1254 eV)<\/li>\n<li>monochromatic X-ray source Al (1487 eV)<\/li>\n<li>8 keV electron gun with a 20 \u00b5m minimum spot size<\/li>\n<li>5 keV ion gun<\/li>\n<li>He I (21.2 eV) and He II (40.8 eV) UV lamp<\/li>\n<li>neutralise electron gun<\/li>\n<li>Low Energy Electron Diffractometer (LEED)<\/li>\n<li>In XPS experiments, the ultimate resolution is 0.45 eV, measured as the FWHM of the Ag 3d5\/2 core level line.<\/li>\n<\/ul>\n<p>In XPS experiments, the ultimate resolution is 0.45 eV, measured as the FWHM of the Ag 3d5\/2 core level line.<\/p>\n<div id=\"attachment_25483\" style=\"width: 810px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25483\" class=\"wp-image-25483 size-full\" title=\"Figure 1: General views of the ESCA system\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy.jpg\" alt=\"Figure 1: General views of the ESCA system\" width=\"800\" height=\"299\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy.jpg 800w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy-300x112.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy-768x287.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/electron_spectroscopy-705x263.jpg 705w\" sizes=\"auto, (max-width: 800px) 100vw, 800px\" \/><\/a><p id=\"caption-attachment-25483\" class=\"wp-caption-text\">Figure 1: General views of the ESCA system<\/p><\/div>\n<h4>Experiments<\/h4>\n<p>The know-how developed around the IEMN ESCA system concerns:<\/p>\n<ul>\n<li>the MBE grown III-V semiconductor surfaces and interfaces<\/li>\n<li>the characterization of process steps during device fabrication<\/li>\n<li>the grafting of organic layers<\/li>\n<\/ul>\n<p>Moreover, this system is available for any kind of analysis from outside the laboratory.<\/p>\n<p><strong>Example: ESCA analysis of InGaAs surface after ALD oxide deposition<\/strong><\/p>\n<p>IEMN has an important activity in the semiconductor processing for the fabrication of opto and micro-electronic devices. In this context, XPS is used to characterize various processing steps, such as etching, annealing.......For instance, one such study has concerned the characterization of the ALD oxide deposition on InGaAs for the fabrication of III-V MOS structures by the IEMN \"Anode\" group. Figure 2 shows the As3d and Ga3d\/In4d XPS core level lines recorded in non-optimized conditions, showing important InGaAs oxidation. On the contrary, in optimized conditions (figure 3), the XPS spectra do not reveal any oxide components on the InGaAs surface.<\/p>\n<p><div id=\"attachment_24851\" style=\"width: 3574px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1.png\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24851\" class=\"wp-image-24851 size-full\" title=\"Figure 2: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in non-optimized conditions. The InGaAs surface is heavily oxidised.\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1.png\" alt=\"Figure 2: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in non-optimized conditions. The InGaAs surface is heavily oxidised. \" width=\"3564\" height=\"1299\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1.png 3564w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1-300x109.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1-768x280.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1-1030x375.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1-1500x547.png 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca1-705x257.png 705w\" sizes=\"auto, (max-width: 3564px) 100vw, 3564px\" \/><\/a><p id=\"caption-attachment-24851\" class=\"wp-caption-text\">Figure 2: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in non-optimized conditions. The InGaAs surface is heavily oxidised.<\/p><\/div><br \/>\n<div id=\"attachment_24853\" style=\"width: 3620px\" class=\"wp-caption alignnone\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis.png\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24853\" class=\"wp-image-24853 size-full\" title=\"Figure 3: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in optimized conditions. Oxide related XPS peaks have disappeared. \" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis.png\" alt=\"Figure 3: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in optimized conditions. Oxide related XPS peaks have disappeared. \" width=\"3610\" height=\"1298\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis.png 3610w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis-300x108.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis-768x276.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis-1030x370.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis-1500x539.png 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/esca_electron_qpectroscopy_chemical_analysis-705x253.png 705w\" sizes=\"auto, (max-width: 3610px) 100vw, 3610px\" \/><\/a><p id=\"caption-attachment-24853\" class=\"wp-caption-text\">Figure 3: As3d (left) and Ga3d\/In4d (right) XPS spectra recorded after ALD oxide deposition on InGaAs in optimized conditions. Oxide related XPS peaks have disappeared.<\/p><\/div><\/p>\n<\/div><\/div><\/div><\/section>\n<section class='av_toggle_section av-maqkfoco-95d53a91c19acec291f14050886c4ca8'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-9' data-fake-id='#toggle-id-9' class='toggler  av-title-above'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-9' data-slide-speed=\"200\" data-title=\"Thermal Analysis\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Thermal Analysis\" data-aria_expanded=\"Click to collapse: Thermal Analysis\">Thermal Analysis<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-9' aria-labelledby='toggle-toggle-id-9' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color'  itemprop=\"text\" ><h4>Thermogravimetric Analysis coupled with Mass spectrometry (TG\/MS)<\/h4>\n<p>TG\/MS Analysis is used to study the thermal behavior of any material (polymers, organic or inorganic, liquid or solid, film, fibers, powder, monolith) while exposed to heating and gas environment. Samples can be treated under various atmospheres.<strong>\u00a0<\/strong><\/p>\n<div id=\"attachment_25208\" style=\"width: 469px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-25208\" class=\"wp-image-25208\" title=\"Figure 1: Thermogravimetry coupled with mass spectrometry apparatus\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2.jpg\" alt=\"\" width=\"459\" height=\"308\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2.jpg 1316w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2-300x201.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2-768x515.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2-1030x690.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/Epiphy_fig2-705x473.jpg 705w\" sizes=\"auto, (max-width: 459px) 100vw, 459px\" \/><\/a><p id=\"caption-attachment-25208\" class=\"wp-caption-text\">Figure 1: Thermogravimetry coupled with mass spectrometry apparatus<\/p><\/div>\n<h4>Gas environment available:<\/h4>\n<p><strong>Inert atmosphere<\/strong>(He, N<sub>2<\/sub>Ar,)<br \/>\n<strong>Oxidizing atmosphere<\/strong>(2% O<sub>2<\/sub> in He, 20%O<sub>2<\/sub> in He)<br \/>\n<strong>Reducing atmosphere<\/strong>diluted hydrogen (3% H<sub>2<\/sub> in Argon), and NH<sub>3<\/sub><br \/>\n<strong>Humid atmosphere<\/strong>Inert and oxidizing atmospheres<br \/>\n<strong>Instrumentation includes 2 different systems: <\/strong><\/p>\n<ul>\n<li>NETZSCH STA 449 F1- covers a temperature ranging from 25 to 1500\u00b0C<\/li>\n<li>NETZSCH STA 409- covers a temperature ranging up to 2000\u00b0C.<\/li>\n<\/ul>\n<p><strong>The two TGA systems are coupled with Quadrupole mass spectrometry (QMS) analysis. <\/strong>Line (capillary-type interface) connecting the TGA to MS can be heated to 300\u00b0C.<\/p>\n<div id=\"attachment_24870\" style=\"width: 555px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis_epiphy.png\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24870\" class=\"wp-image-24870 size-full\" title=\"Figure 2: TG\/MS: Thermal decomposition of hybrid organic-inorganic polymer in helium at 10\u00b0C\/min\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis_epiphy.png\" alt=\"Figure 2: TG\/MS: Thermal decomposition of hybrid organic-inorganic polymer in helium at 10\u00b0C\/min\" width=\"545\" height=\"699\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis_epiphy.png 545w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis_epiphy-234x300.png 234w\" sizes=\"auto, (max-width: 545px) 100vw, 545px\" \/><\/a><p id=\"caption-attachment-24870\" class=\"wp-caption-text\">Figure 2: TG\/MS: Thermal decomposition of hybrid organic-inorganic polymer in helium at 10\u00b0C\/min<\/p><\/div>\n<h4>Specifications<\/h4>\n<p>Sample required<\/p>\n<p>5-30 mg is the minimum mass required for sample analysis.<br \/>\nSamples should be non-explosive and non-corrosive.<\/p>\n<div id=\"attachment_24865\" style=\"width: 624px\" class=\"wp-caption alignright\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis3.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-24865\" class=\"wp-image-24865 size-full\" title=\"Figure 3: Differential calorimeter (up to 600\u00b0C) Brand: Setaram-France\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis3.jpg\" alt=\"Figure 3: Differential calorimeter (up to 600\u00b0C) Brand: Setaram-France\" width=\"614\" height=\"345\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis3.jpg 614w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/thermal_analysis3-300x169.jpg 300w\" sizes=\"auto, (max-width: 614px) 100vw, 614px\" \/><\/a><p id=\"caption-attachment-24865\" class=\"wp-caption-text\">Figure 3: Differential calorimeter (up to 600\u00b0C) Brand: Setaram-France<\/p><\/div>\n<p><strong>Differential Scanning Calorimetry (DSC)<\/strong><\/p>\n<p>DSC provides a convenient method of measuring heat capacities and enthalpy changes. Commercial instruments provide a recorder output of the constant-pressure heat capacity,(Cp) as a function of temperature.<\/p>\n<p>DSC method can be used for the analysis of energetic effects such as:<\/p>\n<ul>\n<li>Melting \/ crystallization behaviour<\/li>\n<li>Solid-solid transitions<\/li>\n<li>Polymorphism<\/li>\n<li>Glass transitions<\/li>\n<li>Cross-linking reactions<\/li>\n<li>heat capacity measurements<\/li>\n<\/ul>\n<blockquote>\n<h4>Contact details<\/h4>\n<p><strong>Dr D. Hourlier<\/strong><br \/>\nInstitute of Electronics, Microelectronics and Nanotechnology<br \/>\nIEMN UMR 8520, Avenue Henri Poincare, BP 60069 F-59652 Villeneuve d'Ascq Cedex-France<br \/>\nRoom 133\/135<br \/>\n<span style=\"color: #f16728;\"><strong>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-1-ec2c04f41b7420486817f2e799a043b8\">\n.av_font_icon.av-mqde7m-1-ec2c04f41b7420486817f2e799a043b8{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-1-ec2c04f41b7420486817f2e799a043b8 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-1-ec2c04f41b7420486817f2e799a043b8 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/strong><\/span>Contact : djamila.hourlier <img loading=\"lazy\" decoding=\"async\" class=\"align=absbottom wp-image-73424\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2035\/05\/arobase_noir.png\" alt=\"\" width=\"14\" height=\"14\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2035\/05\/arobase_noir.png 24w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2035\/05\/arobase_noir-12x12.png 12w\" sizes=\"auto, (max-width: 14px) 100vw, 14px\" \/> univ-lille.fr<\/p>\n<\/blockquote>\n<\/div><\/div><\/div><\/section>\n<\/div><\/p><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":16179,"menu_order":20,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-24754","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/24754","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=24754"}],"version-history":[{"count":2,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/24754\/revisions"}],"predecessor-version":[{"id":73472,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/24754\/revisions\/73472"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/16179"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=24754"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}