{"id":18566,"date":"2018-06-19T15:52:24","date_gmt":"2018-06-19T13:52:24","guid":{"rendered":"https:\/\/www.iemn.fr?page_id=18566"},"modified":"2023-09-22T09:34:53","modified_gmt":"2023-09-22T07:34:53","slug":"mems","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/plateforme-de-caracterisation-multi-physique-pcmp\/caracterisation-haute-frequence\/mems","title":{"rendered":"MEMS"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_one_full  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_35_1c0ybbcuzjw01\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" 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6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>CHOP :   P\u00d4LE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_carc2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:600px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>CHOP :   P\u00d4LE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/09\/sliders_car3-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:31px;width:600px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>CHOP :   P\u00d4LE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-18566'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-quwcqu-bda4e180ff63189dcf0ca5cec1fe3eba\">\n.flex_column.av-quwcqu-bda4e180ff63189dcf0ca5cec1fe3eba{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-quwcqu-bda4e180ff63189dcf0ca5cec1fe3eba av_one_full  avia-builder-el-1  el_after_av_layerslider  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-d32cae5c9a8c7116e9b5a7384dab8284\">\n#top .av-special-heading.av-av_heading-d32cae5c9a8c7116e9b5a7384dab8284{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-av_heading-d32cae5c9a8c7116e9b5a7384dab8284 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-d32cae5c9a8c7116e9b5a7384dab8284 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-d32cae5c9a8c7116e9b5a7384dab8284 av-special-heading-h3  avia-builder-el-2  el_before_av_textblock  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >MEMS<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-jilr1gux-7a19b30c3a00216bcb291b390092c268'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_mems.png\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-18569 alignright\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_mems.png\" alt=\"\" width=\"217\" height=\"135\" \/><\/a>Les performances d\u2019actionneurs bas\u00e9s sur des effets \u00e9lectrostatiques, thermiques ou pi\u00e9zo\u00e9lectriques peuvent \u00eatre\u00a0 mesur\u00e9es. Cela\u00a0 gr\u00e2ce \u00e0 une station sous<\/p>\n<p>pointes d\u00e9di\u00e9e permettant la mesure des d\u00e9placements des actionneurs mais \u00e9galement via un imp\u00e9dancem\u00e8tre , une enceinte d\u2019acc\u00e9l\u00e9rom\u00e9trie sous vide,<\/p>\n<p>un vibrom\u00e8tre laser ou encore, un AFM d\u00e9di\u00e9 au test de pointes MEMS.<\/p>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-jionlnrb-bd0636d064d2cceef82a1529a9e9a080'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p><strong>Contact:<\/strong> Marc FAUCHER <a href=\"mailto:marc.faucher@isen.iemn.univ-lille1.fr\">marc.faucher@isen.iemn.univ-lille1.fr<\/a> 03 20 19 79 47<br \/>\nDidier THERON <a href=\"mailto:didier.theron@iemn.univ-lille1.fr\">didier.theron@iemn.univ-lille1.fr<\/a> 03 20 19 78 26<\/p>\n<\/blockquote>\n<\/div><\/section><br \/>\n<div  class='hr av-174t15y-054411dbc1345af5b15a7a257b302b95 hr-default  avia-builder-el-5  el_after_av_textblock  el_before_av_textblock'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-jilr9pri-68366a480b1a361d8c34ec6ad957ff06'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_vibrometre_laser.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-18571 alignright\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_vibrometre_laser.jpg\" alt=\"\" width=\"249\" height=\"161\" \/><\/a>Laser Vibrometer<\/h4>\n<p>Visualiser les d\u00e9formations de surface, connaitre la vitesse, la fr\u00e9quence et la distance de d\u00e9placement d\u2019un \u00e9l\u00e9ment vibrant, sont des informations primordiales des structures MEMs.\u00a0 Notre vibrom\u00e8tre permet de mesurer des d\u00e9placements inf\u00e9rieurs au picom\u00e8tre pour une fr\u00e9quence maximum de 24MHz.<\/p>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-jionn59w-1d3514f9d20061aefbd65faa9b7319e7'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p><strong>Contact:<\/strong><br \/>\nAbdelkrim TALBI <a href=\"mailto:Abdelkrim.Talbi@iemn.univ-lille1.fr\">Abdelkrim.Talbi@iemn.univ-lille1.fr<\/a> 03 20 19 79 46<\/p>\n<\/blockquote>\n<\/div><\/section><br \/>\n<div  class='hr av-l8etwm-5451d785ec463e72e9a95e2dd7f13256 hr-default  avia-builder-el-8  el_after_av_textblock  el_before_av_textblock'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-jilrd3lf-33484447749bfb11e342582363773dd9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_afm_smart.png\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-18575 alignright\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/plate_forme_caracterisation_afm_smart.png\" alt=\"\" width=\"281\" height=\"168\" \/><\/a><\/h4>\n<h4><\/h4>\n<h4>AFM Smart<\/h4>\n<p>Les sondes pour l\u2019AFM sont un \u00e9l\u00e9ment essentiel pour l\u2019imagerie. Selon les propri\u00e9t\u00e9s de la sonde (fr\u00e9quence, raideur) les modes d\u2019imagerie peuvent varier\u00a0fortement. Nous nous int\u00e9ressons \u00e0 la r\u00e9alisation de sondes innovantes en technologie MEMS fonctionnant \u00e0 haute fr\u00e9quence (quelques dizaines de MHz).<\/p>\n<p>Celles-ci sont actuellement commercialis\u00e9es par la soci\u00e9t\u00e9 <a href=\"http:\/\/vmicro.fr\/products\/\" target=\"_blank\" rel=\"noopener\">Vmicro<\/a>. Ces sondes sont ensuite test\u00e9es sur un AFM commercial Bruker\u00a0multimode \u00e0 l\u2019aide d\u2019une interface sp\u00e9cifique. Pour tester les sondes MEMS destin\u00e9s \u00e0 l\u2019AFM, l\u2019IEMN dispose de 2 AFMs commerciaux Bruker multimode. Ces AFMs sont instrument\u00e9s sp\u00e9cifiquement pour leur permettre de fonctionner avec ces sondes. Nous avons d\u00e9velopp\u00e9 en collaboration avec\u00a0Keysight Technologies une interface sp\u00e9cifique utilisant un signal hyperfr\u00e9quence.<\/p>\n<blockquote>\n<p><strong>Contact:<\/strong> Marc FAUCHER <a href=\"mailto:marc.faucher@isen.iemn.univ-lille1.fr\">marc.faucher@isen.iemn.univ-lille1.fr<\/a> 03 20 19 79 47<br \/>\nDidier THERON <a href=\"mailto:didier.theron@iemn.univ-lille1.fr\">didier.theron@iemn.univ-lille1.fr<\/a> 03 20 19 78 26<\/p>\n<\/blockquote>\n<\/div><\/section><\/p><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":14195,"menu_order":25,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-18566","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/18566","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=18566"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/18566\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/14195"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=18566"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}