{"id":12293,"date":"2016-08-18T14:23:36","date_gmt":"2016-08-18T12:23:36","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/cmnf\/ses-equipements\/\/topographie-morphologie"},"modified":"2024-07-02T15:29:18","modified_gmt":"2024-07-02T13:29:18","slug":"topographie-morphologie","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/caracterisation\/topographie-morphologie","title":{"rendered":"Microscopy Topography Morphology"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_three_fifth  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_1tdz3tqtwdnc5\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" 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https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" 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https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-12293'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-4ff224l-4c0633ae13cc6387ca109eb0de50edc4 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ff224l-4c0633ae13cc6387ca109eb0de50edc4\">\n.flex_column.av-4ff224l-4c0633ae13cc6387ca109eb0de50edc4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4ff224l-4c0633ae13cc6387ca109eb0de50edc4 av_three_fifth  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ot6r7p-ae4a4aa535e5fec29ba3a279a4f80501\">\n#top .av-special-heading.av-ot6r7p-ae4a4aa535e5fec29ba3a279a4f80501{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-ot6r7p-ae4a4aa535e5fec29ba3a279a4f80501 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-ot6r7p-ae4a4aa535e5fec29ba3a279a4f80501 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-ot6r7p-ae4a4aa535e5fec29ba3a279a4f80501 av-special-heading-h3  avia-builder-el-2  el_before_av_textblock  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Microscopy Topography Morphology<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-3zrlf7p-aceeaeddd3740cf664feee3ed8dcfc39'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">La centrale de micro et nano fabrication de l\u2019IEMN poss\u00e8de de nombreux outils microscopie et de caract\u00e9risation de surface afin de contr\u00f4ler la validit\u00e9 d\u2019un proc\u00e9d\u00e9 en cours de fabrication.<\/p>\n<ul>\n<li style=\"text-align: justify;\">\u00a0Mesure de hauteur de marches (r\u00e9sines, gravures, m\u00e9tallisation) avec une gamme de mesures en Z allant du nanom\u00e8tre \u00e0 plusieurs millim\u00e8tres par diff\u00e9rents appareils (AFM, Profilom\u00e8tres optiques ou m\u00e9canique)<\/li>\n<li style=\"text-align: justify;\">\u00a0Repr\u00e9sentation en 3 dimensions avec possibilit\u00e9 de reconstruction d\u2019images (stitching) sur de grands objets (\u00e9tude de morphologie ou de topographie par AFM, Fogale ,\u2026)<\/li>\n<li style=\"text-align: justify;\">Mesure de rugosit\u00e9 de surface (RMS, Ra, \u2026)<\/li>\n<li style=\"text-align: justify;\">Mesures d\u2019\u00e9paisseur de mat\u00e9riaux semi-transparents par r\u00e9flectom\u00e9trie et \u00e9llipsom\u00e9trie.<\/li>\n<li>\n<p class=\"moz-quote-pre\">Deux microscopes num\u00e9riques Keyence VHX6000 et VHX7000 : reconstruction d\u2019image sur 750 mm (reconstruction). Mesure de hauteur par delta de position de Z. Imagerie en tilt.<\/p>\n<\/li>\n<\/ul>\n<p>En termes d\u2019observation et validation des process nanom\u00e9triques du laboratoire, nos microscopes \u00e9lectroniques \u00e0 balayage ( Zeiss Ultra55\/EDS Bruker, Zeiss Supra55VP\/EBSD Oxford) permettent d\u2019observer et de dimensionner des dispositifs, dont la taille est de l\u2019ordre de la dizaine de nanom\u00e8tres. L\u2019observation de surface ou de coupe cliv\u00e9e est possible sur tout type de mat\u00e9riaux isolants (r\u00e9sines, oxydes ou nitrures) ou conducteurs (substrats Si ou III\/V, m\u00e9tallisations,\u2026). La gamme des tensions d\u2019acc\u00e9l\u00e9rations (200V \u00e0 30kV) permet toutes les observations sans m\u00e9tallisation en cours de process.<\/p>\n<p style=\"text-align: justify;\">Tous ces outils sont situ\u00e9s en salle blanche et sont accessibles librement apr\u00e8s formation par un ing\u00e9nieur de la plateforme<\/p>\n<\/div><\/section><\/p><\/div><div class='av-flex-placeholder'><\/div><div  class='flex_column av-vjzbph-d3e18f9ccbc6ddc5e07f9894142ed272 av_one_fifth  avia-builder-el-4  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ly3769fn-360861409b9f2d19537c3b8a1b5a1bc6\">\n.avia-image-container.av-ly3769fn-360861409b9f2d19537c3b8a1b5a1bc6 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-ly3769fn-360861409b9f2d19537c3b8a1b5a1bc6 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-ly3769fn-360861409b9f2d19537c3b8a1b5a1bc6 av-styling- avia-align-center  avia-builder-el-5  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-67200 avia-img-lazy-loading-not-67200 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-169x300.jpg\" alt='' title='VHX6000'  height=\"300\" width=\"169\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-169x300.jpg 169w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-580x1030.jpg 580w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-768x1365.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-864x1536.jpg 864w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-7x12.jpg 7w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-844x1500.jpg 844w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-397x705.jpg 397w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/VHX6000-rotated.jpg 1000w\" sizes=\"(max-width: 169px) 100vw, 169px\" \/><\/div><\/div><\/div><\/div><\/p>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-z9rfc5-19d1479c7d9bfb25d96fbdaf02ab107a av_one_fifth  avia-builder-el-6  el_after_av_one_fifth  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-middle'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-s8fhfp-472a960536496fce61db5380548ddf09\">\n.avia-image-container.av-s8fhfp-472a960536496fce61db5380548ddf09 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-s8fhfp-472a960536496fce61db5380548ddf09 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-s8fhfp-472a960536496fce61db5380548ddf09 av-styling- avia-align-center  avia-builder-el-7  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-67201 avia-img-lazy-loading-not-67201 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-300x292.jpg\" alt='' title='reconstruction 3 inch'  height=\"292\" width=\"300\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-300x292.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-768x747.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-12x12.jpg 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-36x36.jpg 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch-705x686.jpg 705w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/reconstruction-3-inch.jpg 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div><\/div><\/div><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3cbnh7p-f8e37ff473175c9219e23fb70a9d2af6\">\n.flex_column.av-3cbnh7p-f8e37ff473175c9219e23fb70a9d2af6{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3cbnh7p-f8e37ff473175c9219e23fb70a9d2af6 av_one_full  avia-builder-el-8  el_after_av_one_fifth  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><div  class='avia-logo-element-container av-33yga9x-165ef70c4f576bf7245ed0549e6ea0c8 av-border-deactivate avia-logo-grid avia-content-slider avia-smallarrow-slider avia-content-grid-active noHover avia-content-slider-odd  avia-builder-el-9  avia-builder-el-no-sibling  avia-content-slider1' ><div class='avia-smallarrow-slider-heading  no-logo-slider-heading'><div class='new-special-heading'>&nbsp;<\/div><\/div><div class=\"avia-content-slider-inner\"><div class=\"slide-entry-wrap\"><div  class='slide-entry av-9bogcl-884819e3e32bc27a62c9f3a931e099e5 flex_column no_margin av_one_fifth real-thumbnail post-entry slide-entry-overview slide-loop-1 slide-parity-odd  first'><\/div><div  class='slide-entry av-1zalt7p-20e0b8bfaa2b09d744788efe7088d4c2 flex_column no_margin av_one_fifth real-thumbnail post-entry slide-entry-overview slide-loop-2 slide-parity-even'><\/div><div  class='slide-entry av-5gf5yd-6358c63c412c52f559438341006bdb1e flex_column no_margin av_one_fifth real-thumbnail post-entry slide-entry-overview slide-loop-3 slide-parity-odd'><\/div><div  class='slide-entry av-188gd7p-add2fea7d5ec030fece3612877877375 flex_column no_margin av_one_fifth real-thumbnail post-entry slide-entry-overview slide-loop-4 slide-parity-even'><\/div><div  class='slide-entry av-sestlx-d9106c1658a69280c463250830efd7ce flex_column no_margin av_one_fifth real-thumbnail post-entry slide-entry-overview slide-loop-5 slide-parity-odd post-entry-last'><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":18668,"menu_order":30,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-12293","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/12293","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=12293"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/12293\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/18668"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=12293"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}