{"id":11785,"date":"2012-05-10T12:29:23","date_gmt":"2012-05-10T10:29:23","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/caracterisation\/caracterisations-physico-chimiques"},"modified":"2024-05-13T16:01:59","modified_gmt":"2024-05-13T14:01:59","slug":"faisceau","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/caracterisation\/faisceau","title":{"rendered":"Faisceau \/ beam"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_37z66jhiz25g\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" 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id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-11785'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-60c8d5517fbb75d772552a0ff53be88f\">\n#top .av-special-heading.av-av_heading-60c8d5517fbb75d772552a0ff53be88f{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-av_heading-60c8d5517fbb75d772552a0ff53be88f .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-60c8d5517fbb75d772552a0ff53be88f .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-60c8d5517fbb75d772552a0ff53be88f av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_full  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Faisceau \/ beam<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-w6b2i1-5beef30b51bf4160e4dc4290beb140d8\">\n.flex_column.av-w6b2i1-5beef30b51bf4160e4dc4290beb140d8{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-w6b2i1-5beef30b51bf4160e4dc4290beb140d8 av_one_full  avia-builder-el-2  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-jl6nn9wp-41308340eb98b31da716d536473f04e1'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Electron Spectroscopy for Chemical Analysis (E.S.C.A.)<\/h4>\n<blockquote>\n<p>D\u00e9tails : site web du <a href=\"https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/\" target=\"_blank\" rel=\"noopener\">groupe EPIPHY<\/a><\/p>\n<\/blockquote>\n<p>The surface analysis system (Electron Spectroscopy for Chemical Analysis) is connected under ultra-high vacuum to the 2 molecular beam epitaxy racks and to an airlock allowing the analysis of all types of samples. The base is a Physical Electronics type 5600 system mechanically modified by Sinvaco to ensure compatibility with 3 inch MBE molyblocks. It is equipped with :<\/p>\n<ul>\n<li>a manipulator allowing the 3 translations and 2 rotations (polar and azimuthal)<\/li>\n<li>a hemispherical analyzer with a 150 mm radius<\/li>\n<li>of a standard X-ray source with a Dual anode Al(1487eV)\/Mg(1254 eV)<\/li>\n<li>of a monochromatized X-ray source Al (1487 eV)<\/li>\n<li>an electron gun with a maximum energy of 8 keV and a spot size of about 20 mm<\/li>\n<li>an ionic sputtering gun with a maximum energy of 5 keV<\/li>\n<li>a source of UV HeI rays (21.2 eV)<\/li>\n<li>an electronic neutralisation gun for the analysis of insulators<\/li>\n<li>a low energy electron diffractometer (LEED)<\/li>\n<\/ul>\n<p>In X-ray induced electron spectroscopy (XPS), the ultimate resolution of the system measured as the width at half height of the Ag 3d5\/2 line is 0.45 eV.<\/p>\n<div id=\"attachment_20207\" style=\"width: 433px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-20207\" class=\"wp-image-20207\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques.jpg\" alt=\"\" width=\"423\" height=\"198\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques.jpg 866w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques-300x140.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques-768x359.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques-705x330.jpg 705w\" sizes=\"auto, (max-width: 423px) 100vw, 423px\" \/><\/a><p id=\"caption-attachment-20207\" class=\"wp-caption-text\">Analyse de surface ESCA : scan XPS<\/p><\/div>\n<h4><\/h4>\n<h4>Diffraction of a beam of X-ray photons<\/h4>\n<p>D\u00e9tails : site web du <a href=\"https:\/\/www.iemn.fr\/en\/la-recherche\/les-groupes\/epiphy\/\" target=\"_blank\" rel=\"noopener\">groupe EPIPHY<\/a><\/p>\n<p>The diffraction of a beam of X-ray photons by a crystal allows a fine analysis of its structure. The IEMN is equipped to analyze the physical structure of single crystal semiconductor materials. A PANalytical X'Pert Pro MRD goniometer with double X-ray diffraction allows us to measure important parameters in the field of epitaxial growth such as the lattice parameter, the composition of alloys or the relaxation rate of a constrained crystal.<\/p>\n<p>This system allows non-destructive testing of samples mounted on an x-y table accepting substrates up to 100 mm in diameter. Main applications:<\/p>\n<ul>\n<li>\u00a0measurements of alloy compositions and layer thicknesses<\/li>\n<li>\u00a0control of the adaptation in mesh parameter with the substrate<\/li>\n<li>\u00a0quality of interfaces in super networks<\/li>\n<li>\u00a0constrained thin films<\/li>\n<li>\u00a0relaxation rate and tilt of mismatched thick layers<\/li>\n<\/ul>\n<h4>Scanning Electron Microscopy (SEM)<\/h4>\n<p>In terms of observation and validation of nanometric processes in the laboratory, our scanning electron microscopes (Zeiss Ultra55\/EDS Bruker, Zeiss Supra55VP\/EBSD Oxford) allow us to observe and dimension devices, whose size is in the order of ten nanometers. The observation of surface or cleaved section is possible on any type of insulating materials (resins, oxides or nitrides) or conductors (Si or III\/V substrates, metallizations,...). The range of acceleration voltages (200V to 30kV) allows all observations without metallization during the process.<\/p>\n<h4>Energy dispersive spectroscopy (EDS)<\/h4>\n<p>Syst\u00e8me EDS Xflash 4010 Bruker, type SDD (Silicon Drift Detector)<\/p>\n<p>Catacteritics<\/p>\n<ul>\n<li>R\u00e9solution du Mn Ka \u00e0 127 eV\u00a0 de 0 \u00e0 100\u00a0000 cps<\/li>\n<li>Qualitative<\/li>\n<li>Quantitative<\/li>\n<li>Mapping<\/li>\n<\/ul>\n<div id=\"attachment_20212\" style=\"width: 352px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques_caracterisations.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-20212\" class=\"wp-image-20212\" title=\"Analyse chimique \u00e9l\u00e9mentaire par EDS\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques_caracterisations.jpg\" alt=\"Analyse chimique \u00e9l\u00e9mentaire par EDS\" width=\"342\" height=\"256\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques_caracterisations.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques_caracterisations-300x225.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_physico_chimiques_caracterisations-705x529.jpg 705w\" sizes=\"auto, (max-width: 342px) 100vw, 342px\" \/><\/a><p id=\"caption-attachment-20212\" class=\"wp-caption-text\">Analyse chimique \u00e9l\u00e9mentaire par EDS<\/p><\/div>\n<h4>Electron Backscatter Diffraction (EBSD)<\/h4>\n<p>The IEMN is also equipped with an EBSD (electron backscatter diffraction) detector on one of its scanning electron microscopes for the determination of the local orientation on crystalline material. We can thus carry out quantitative analyses by mapping microstructures, evaluate the orientations of crystallized films, map disorientations,...<\/p>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":18668,"menu_order":35,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-11785","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/11785","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=11785"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/11785\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/18668"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=11785"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}