{"id":11547,"date":"2016-08-24T10:15:03","date_gmt":"2016-08-24T08:15:03","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/gravure\/gravure-profonde-du-silicium"},"modified":"2024-06-18T10:31:13","modified_gmt":"2024-06-18T08:31:13","slug":"gravure-profonde-du-silicium","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-profonde-du-silicium","title":{"rendered":"Deep etching of silicon"},"content":{"rendered":"<div  class='flex_column av-1wwoy1n-a7a3b725e3ebc227a0b9adaf754c274e av_one_full  avia-builder-el-0  el_before_av_one_fifth  avia-builder-el-first  first flex_column_div'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-e25wrbv-14a23a1768f7e53d12b0f8d748651368\">\n#top .av-special-heading.av-e25wrbv-14a23a1768f7e53d12b0f8d748651368{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-e25wrbv-14a23a1768f7e53d12b0f8d748651368 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-e25wrbv-14a23a1768f7e53d12b0f8d748651368 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-e25wrbv-14a23a1768f7e53d12b0f8d748651368 av-special-heading-h3  avia-builder-el-1  avia-builder-el-no-sibling'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Deep etching of silicon<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n<div  class='flex_column av-nwx1nf-14851c13dede430b7d92d3b16e1b0bad av_one_fifth  avia-builder-el-2  el_after_av_one_full  el_before_av_one_fifth  first flex_column_div  column-top-margin'     ><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fs8y09n-4b577301ea75830f55e4066254fc843e\">\n.flex_column.av-fs8y09n-4b577301ea75830f55e4066254fc843e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fs8y09n-4b577301ea75830f55e4066254fc843e av_one_fifth  avia-builder-el-3  el_after_av_one_fifth  el_before_av_two_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lxk4zwma-a68e1895230ef9b03b512916b8e6f335\">\n.avia-image-container.av-lxk4zwma-a68e1895230ef9b03b512916b8e6f335 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lxk4zwma-a68e1895230ef9b03b512916b8e6f335 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lxk4zwma-a68e1895230ef9b03b512916b8e6f335 av-styling- avia-align-center  avia-builder-el-4  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-65402 avia-img-lazy-loading-not-65402 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-292x300.png\" alt='' title='estrelas plasmapro100'  height=\"300\" width=\"292\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-292x300.png 292w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-1001x1030.png 1001w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-768x790.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100-685x705.png 685w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/estrelas-plasmapro100.png 1380w\" sizes=\"(max-width: 292px) 100vw, 292px\" \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-eu0zvbv-f73bd830599ee33d5e84d98ab5cd7ff3\">\n.flex_column.av-eu0zvbv-f73bd830599ee33d5e84d98ab5cd7ff3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-eu0zvbv-f73bd830599ee33d5e84d98ab5cd7ff3 av_two_fifth  avia-builder-el-5  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-ei82svv-c0846a358926adb00f310359070cfc7a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">Two reactors (SPTS Rapier, Oxford Estrelas) are dedicated to the <strong>deep anisotropic etching of Si<\/strong> <strong>and YOURSELF<\/strong> to make the <strong>switched process <i>Bosch<\/i><\/strong> et le <strong>process <\/strong><i><strong>cryogenic<\/strong> <\/i>(continuous etching in the SF6\/O2 mixture over the temperature range -70\u00b0C to -150\u00b0C).<i>\u00a0<\/i><\/p>\n<\/div><\/section><\/div>\n<div  class='flex_column av-av_one_fifth-40977bc09da27d5fd81d8979a05c6d09 av_one_fifth  avia-builder-el-7  el_after_av_two_fifth  el_before_av_one_full  flex_column_div  column-top-margin'     ><\/div>\n<div  class='flex_column av-16e6t0b-b84de433e44be5d35aa06f380aa4b844 av_one_full  avia-builder-el-8  el_after_av_one_fifth  el_before_av_three_fifth  first flex_column_div  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-niict7-08910b5f5701ad03bd58df3c4fb928b8\">\n#top .av-special-heading.av-niict7-08910b5f5701ad03bd58df3c4fb928b8{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-niict7-08910b5f5701ad03bd58df3c4fb928b8 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-niict7-08910b5f5701ad03bd58df3c4fb928b8 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-niict7-08910b5f5701ad03bd58df3c4fb928b8 av-special-heading-h6  avia-builder-el-9  avia-builder-el-no-sibling'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Deposits of organic thin films under vacuum are also proposed (parylene, pentacene,...).<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n<div class='flex_column_table av-drhf0uz-294f903b4f4ef42aab70a0115766e820 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-drhf0uz-294f903b4f4ef42aab70a0115766e820\">\n.flex_column.av-drhf0uz-294f903b4f4ef42aab70a0115766e820{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-drhf0uz-294f903b4f4ef42aab70a0115766e820 av_three_fifth  avia-builder-el-10  el_after_av_one_full  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-czfnuvv-bf260b0d1300bc64846d7c6bd22f56b7'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">- Variation of the etching profile, such as the angle of the etching flanks, by adjusting the oxygen content in the SF6\/O2 mixture in cryogenic etching.<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-cuwl8aj-507b616031fc179cd6a60bfbed874007\">\n.flex_column.av-cuwl8aj-507b616031fc179cd6a60bfbed874007{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-cuwl8aj-507b616031fc179cd6a60bfbed874007 av_one_fifth  avia-builder-el-12  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><div  class='avia-logo-element-container av-c7nwrvf-4dd6c94d70f404d103c3eece4539ee22 av-border-deactivate avia-logo-grid avia-content-slider avia-smallarrow-slider avia-content-grid-active noHover avia-content-slider-even  avia-builder-el-13  avia-builder-el-no-sibling  avia-content-slider1' ><div class='avia-smallarrow-slider-heading  no-logo-slider-heading'><div class='new-special-heading'>&nbsp;<\/div><\/div><div class=\"avia-content-slider-inner\"><div class=\"slide-entry-wrap\"><div  class='slide-entry av-bptz7ff-5ef62a861ebaa137144501860d423589 flex_column no_margin av_one_half real-thumbnail post-entry slide-entry-overview slide-loop-1 slide-parity-odd  first'><\/div><div  class='slide-entry av-bhe9zqz-ae9be8d9d08095c7ded3c0738af2accf flex_column no_margin av_one_half real-thumbnail post-entry slide-entry-overview slide-loop-2 slide-parity-even post-entry-last'><\/div><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-b031fp7-2eb6a0394e034e00cc4a2a959ea0a5e9\">\n.flex_column.av-b031fp7-2eb6a0394e034e00cc4a2a959ea0a5e9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-b031fp7-2eb6a0394e034e00cc4a2a959ea0a5e9 av_one_fifth  avia-builder-el-14  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-a7dvxnf-d71f5154ee731036e04707d6bce1ecd3\">\n#top .av_textblock_section.av-a7dvxnf-d71f5154ee731036e04707d6bce1ecd3 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-a7dvxnf-d71f5154ee731036e04707d6bce1ecd3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>1.\u00a0 Change of etching angle with the variation of oxygen rate in cryogenic process<br \/>\n<\/i><\/p>\n<p><i><br \/>\n<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-78t6d3v-752a6638a21b12cd11d24ae763d6fd2e sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-78t6d3v-752a6638a21b12cd11d24ae763d6fd2e\">\n.flex_column.av-78t6d3v-752a6638a21b12cd11d24ae763d6fd2e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-78t6d3v-752a6638a21b12cd11d24ae763d6fd2e av_three_fifth  avia-builder-el-16  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-6ooq47v-c9e34900458a3d166d7b49622f00d512'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">- Bosch process for creating membranes, especially on SOI, with stress control, thin thicknesses, or even drilled membranes. Typically used for MEMs or BioMEMs applications.<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-663cgsb-dd51bfe1ed405d98252f310921222efe\">\n.flex_column.av-663cgsb-dd51bfe1ed405d98252f310921222efe{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-663cgsb-dd51bfe1ed405d98252f310921222efe av_one_fifth  avia-builder-el-18  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5q9ox6j-68eed5232175bbc3c966e644ecaecb02\">\n.avia-image-container.av-5q9ox6j-68eed5232175bbc3c966e644ecaecb02 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-5q9ox6j-68eed5232175bbc3c966e644ecaecb02 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-5q9ox6j-68eed5232175bbc3c966e644ecaecb02 av-styling- avia-align-center  avia-builder-el-19  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/08\/Ex-gravure-Bosch-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5eibkwr-8eeebff512a07db839878fc99221047e\">\n.flex_column.av-5eibkwr-8eeebff512a07db839878fc99221047e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5eibkwr-8eeebff512a07db839878fc99221047e av_one_fifth  avia-builder-el-20  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4yg9tob-d58a80873d4420dd6a3d2619816ed97e\">\n#top .av_textblock_section.av-4yg9tob-d58a80873d4420dd6a3d2619816ed97e .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-4yg9tob-d58a80873d4420dd6a3d2619816ed97e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>2. Production of HF MEMs for AFM by Si Bosch etching (NAM6 team)<\/em><\/p>\n<p><i>\u00a0<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-4cqb3qz-9f5f910b1d28dd2742341bf00cbf56c1 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4cqb3qz-9f5f910b1d28dd2742341bf00cbf56c1\">\n.flex_column.av-4cqb3qz-9f5f910b1d28dd2742341bf00cbf56c1{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4cqb3qz-9f5f910b1d28dd2742341bf00cbf56c1 av_three_fifth  avia-builder-el-22  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-43mo9jv-9d4d1869c31f816e3508a5c78f8f1bdc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">- Deep and very dense engravings by Bosch process, such as \u00b5-pillars or \u00b5-tubes. Engraving possible up to 100 \u00b5m depth on tube diameters of 2 \u00b5m-3 \u00b5m and pitch of 1 \u00b5m. Used in particular in energy storage applications.<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3mfd63f-7a8fa0f4b8d88be17f0cd86152c9f02f\">\n.flex_column.av-3mfd63f-7a8fa0f4b8d88be17f0cd86152c9f02f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3mfd63f-7a8fa0f4b8d88be17f0cd86152c9f02f av_one_fifth  avia-builder-el-24  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-34f8oyj-a39afb4283ddf86c02fe03a569c238c4\">\n.avia-image-container.av-34f8oyj-a39afb4283ddf86c02fe03a569c238c4 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-34f8oyj-a39afb4283ddf86c02fe03a569c238c4 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-34f8oyj-a39afb4283ddf86c02fe03a569c238c4 av-styling- avia-align-center  avia-builder-el-25  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/08\/Ex1_Gravure-Bosch-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2qp520r-2db6497d2eb0d26833e3aa27f36460bf\">\n.flex_column.av-2qp520r-2db6497d2eb0d26833e3aa27f36460bf{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2qp520r-2db6497d2eb0d26833e3aa27f36460bf av_one_fifth  avia-builder-el-26  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-25pyubf-f68a5cbc5a9b724a90a72b8b0dcd06f5\">\n#top .av_textblock_section.av-25pyubf-f68a5cbc5a9b724a90a72b8b0dcd06f5 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-25pyubf-f68a5cbc5a9b724a90a72b8b0dcd06f5'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>3. etching of microtubes, diameter 2\u00b5m, pitch 1\u00b5m using the Bosch process (CSAM group, C. Lethien, RS2E)<br \/>\n<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-9t65v7f-3feec6e10abcf4df903facc3fcf3376f sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9t65v7f-3feec6e10abcf4df903facc3fcf3376f\">\n.flex_column.av-9t65v7f-3feec6e10abcf4df903facc3fcf3376f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-9t65v7f-3feec6e10abcf4df903facc3fcf3376f av_three_fifth  avia-builder-el-28  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-9inx6l7-d10f1a8baf320d792e98f3c0742d2a41'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\" class=\"translation-block\">- Deep anisotropic etchings with very <strong>low sidewall roughness<\/strong> by cryogenic process. Generally used for optoelectronic component realization as a replacement for Bosch etching for this reason.<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7wh3im3-080ed7eb47ad4b2f2506ab69bd3e0c4b\">\n.flex_column.av-7wh3im3-080ed7eb47ad4b2f2506ab69bd3e0c4b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7wh3im3-080ed7eb47ad4b2f2506ab69bd3e0c4b av_one_fifth  avia-builder-el-30  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-94me0u3-a4dbe308ebb4eb18d213538dd377b366\">\n.flex_column.av-94me0u3-a4dbe308ebb4eb18d213538dd377b366{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-94me0u3-a4dbe308ebb4eb18d213538dd377b366 av_one_fifth  avia-builder-el-31  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-15nmvff-d840a5ea038bd41c0e5e76cf2e619d60\">\n.flex_column.av-15nmvff-d840a5ea038bd41c0e5e76cf2e619d60{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-15nmvff-d840a5ea038bd41c0e5e76cf2e619d60 av_three_fifth  avia-builder-el-32  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-rv5i2j-d1d21103b788930995d93d2b5a2f3289'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>- Silicon substrate feedthrough in Bosch process<\/p>\n<p>- Deposition of conformal C4F8 layers on any type of surface including nanowires. Use as surface functionalization to increase contact angle in microfluidic applications, bioMEMs,...<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1qs3uez-dc7ffc3ed9627060890ffdadf4a132f8\">\n.flex_column.av-1qs3uez-dc7ffc3ed9627060890ffdadf4a132f8{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1qs3uez-dc7ffc3ed9627060890ffdadf4a132f8 av_one_fifth  avia-builder-el-34  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-11whh3v-cee67f4b957d23f483e352bc338630ee\">\n.flex_column.av-11whh3v-cee67f4b957d23f483e352bc338630ee{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-11whh3v-cee67f4b957d23f483e352bc338630ee av_one_fifth  avia-builder-el-35  el_after_av_one_fifth  el_before_av_hr  flex_column_div av-zero-column-padding  column-top-margin'     ><\/div>\n<div  class='hr av-qlnzgb-8ee3e43415ec5c87b918d81207c064d3 hr-default  avia-builder-el-36  el_after_av_one_fifth  el_before_av_textblock'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-lxk56uh0-3624801f2a2990b5ad867c282b59ebec'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>Contact: Dmitri Yarekha<\/p>\n<\/blockquote>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":447,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-11547","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/11547","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=11547"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/11547\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=11547"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}