{"id":10938,"date":"2016-04-06T09:31:32","date_gmt":"2016-04-06T07:31:32","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/ressource-lithographie\/lithographie-laser-2d"},"modified":"2016-09-30T14:44:35","modified_gmt":"2016-09-30T12:44:35","slug":"lithographie-laser-2d","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/lithographie-laser-2d","title":{"rendered":"2D laser lithography"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_one_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_one_fifth  avia-builder-el-0  el_before_av_two_third  avia-builder-el-first  first flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-2e9df1d56a599132fb5c20c9db253c8f\">\n.avia-image-container.av-av_image-2e9df1d56a599132fb5c20c9db253c8f img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-2e9df1d56a599132fb5c20c9db253c8f .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-2e9df1d56a599132fb5c20c9db253c8f av-styling- avia-align-center  avia-builder-el-1  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/laser-2D-180x180.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_two_third-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_two_third-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_two_third-9c1d454dc06f7247226bc4e8f931daae av_two_third  avia-builder-el-2  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">The laser lithography is done with a Dilase 650 machine (Klo\u00e9).<\/p>\n<p style=\"text-align: justify;\">The laser source with a wavelength of 375 nm allows writing with most optical resins on any type of substrate (mask blank, semiconductor, glass, polymer, crystal, flexible film...). The samples can go from a few mm\u00b2 to 4 inches. The minimum pattern resolution is slightly less than a micron.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-070b0af69bc4107ab1a6617612b95af7\">\n#top .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7{\npadding-bottom:15px;\n}\nbody .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-070b0af69bc4107ab1a6617612b95af7 av-special-heading-h6  avia-builder-el-4  el_after_av_two_third  el_before_av_three_fifth'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: some highlights<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-5  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Prototyping, non-contact writing and no optical mask,<\/strong> useful for developing processes before making an optical mask.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-7  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-de9c01f0139926df6d6797456c8114e2\">\n.avia-image-container.av-av_image-de9c01f0139926df6d6797456c8114e2 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-de9c01f0139926df6d6797456c8114e2 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-de9c01f0139926df6d6797456c8114e2 av-styling- avia-align-center  avia-builder-el-8  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex1-laser2D-80x80.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-9  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ol>\n<li><em>SPR220 2\u00b5m sur silicium (\u00e9quipe CSAM)<br \/>\n<\/em><\/li>\n<\/ol>\n<p><em>\u00a0<\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>High aspect ratios<\/strong>, the laser's depth of field allows for high aspect ratios, useful for example for microchannels<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-13  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-0dcf64721ab6882a0f4338bb15e515a0\">\n.avia-image-container.av-av_image-0dcf64721ab6882a0f4338bb15e515a0 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-0dcf64721ab6882a0f4338bb15e515a0 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-0dcf64721ab6882a0f4338bb15e515a0 av-styling- avia-align-center  avia-builder-el-14  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-laser2D-80x80.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em> 2. 1\u00b5m wide cross, AZ15nXT 8\u00b5m resin on silicon<\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Grayscale<\/strong>, the ability to vary the power received by the resin allows for 3D structuring of the resin during development<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-19  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-6c34029882b674b105ce0794d7d3bbbc\">\n.avia-image-container.av-av_image-6c34029882b674b105ce0794d7d3bbbc img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-6c34029882b674b105ce0794d7d3bbbc .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-6c34029882b674b105ce0794d7d3bbbc av-styling- avia-align-center  avia-builder-el-20  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex-litho-laser-80x80.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>3. 1\u00b5m steps every 100\u00b5m with 4\u00b5m of SPR220 resin on silicon<\/em><\/p>\n<p><em>\u00a0<\/em><\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-7461d47e19df4e7e27565b200b64ec09\">\n#top .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-7461d47e19df4e7e27565b200b64ec09 av-special-heading-h6  avia-builder-el-23  el_after_av_one_fifth  el_before_av_three_fifth'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: other<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-24  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>\u2013 Ecriture sur substrats souples<\/p>\n<p>\u2013 Ecriture sur \u00e9chantillons fortement structur\u00e9s<\/p>\n<p>&#8211; &#8230;<\/p>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":0,"menu_order":2,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10938","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10938","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10938"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10938\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10938"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}