{"id":10746,"date":"2016-04-20T09:38:27","date_gmt":"2016-04-20T07:38:27","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/depots-couches-minces\/depots-physiques"},"modified":"2024-11-07T16:04:52","modified_gmt":"2024-11-07T14:04:52","slug":"depots-physiques","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/depots-couches-minces\/depots-physiques","title":{"rendered":"Physical Vapour Deposition (PVD)"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_1wqmlnb92dbl3\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-10746'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1y51pzu-2b7baa76713f71c2b7f82a3ddf5756f8\">\n#top .av-special-heading.av-1y51pzu-2b7baa76713f71c2b7f82a3ddf5756f8{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-1y51pzu-2b7baa76713f71c2b7f82a3ddf5756f8 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-1y51pzu-2b7baa76713f71c2b7f82a3ddf5756f8 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-1y51pzu-2b7baa76713f71c2b7f82a3ddf5756f8 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_two_third  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Physical Vapour Deposition (PVD)<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<div class='flex_column_table av-lz6tn815-8b9c306f0eb3ccef2acd9ce0f59094d6 sc-av_two_third av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lz6tn815-8b9c306f0eb3ccef2acd9ce0f59094d6\">\n#top .flex_column_table.av-equal-height-column-flextable.av-lz6tn815-8b9c306f0eb3ccef2acd9ce0f59094d6{\nmargin-top:0px;\nmargin-bottom:0px;\n}\n.flex_column.av-lz6tn815-8b9c306f0eb3ccef2acd9ce0f59094d6{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-lz6tn815-8b9c306f0eb3ccef2acd9ce0f59094d6 av_two_third  avia-builder-el-2  el_after_av_heading  el_before_av_one_third  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><section  class='av_textblock_section av-se0xbu-b2bde06720d9fdc0c3490f089a073661'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Nous nous appuyons principalement sur deux techniques de d\u00e9p\u00f4t physique en phase vapeur qui sont l\u2019\u00e9vaporation et la pulv\u00e9risation cathodique, pour proposer des m\u00e9taux pour \u00e9lectrodes, contacts ohmiques, \u00e9paississements, collage direct de substrat, \u00e9coulement des charges au masqueur, des multicouches de\u00a0mat\u00e9riaux magn\u00e9tiques et multi-ferro\u00efques nanostructur\u00e9es, des nitrures de m\u00e9taux de transition pour \u00e9lectrodes et \u00e9lectrodes capacitives, des isolants et des semiconducteurs.\u00a0Les caract\u00e9ristiques et propri\u00e9t\u00e9s de ces mat\u00e9riaux sont utilis\u00e9es dans les domaines suivants\u00a0:<\/p>\n<p>-Le microstockage de l\u2019\u00e9nergie (microsupercondensateur pour l\u2019IOT, microcondensateur hybride tout solide pour l\u2019\u00e9lectronique haute tension, microbatterie)<\/p>\n<p>-La micro et nano\u00e9lectronique, photonique THz et opto\u00e9lectronique des fili\u00e8res IIIV, GaN ou Si<\/p>\n<p>-Les MEMS\/NEMS Si et GaN, les bioMEMS et la microfluidique<\/p>\n<p>-La spintronique THz et les dispositifs magn\u00e9to-acoustiques<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-e4tadao-d0a2f51e05a9fb734299c08785691974\">\n#top .flex_column_table.av-equal-height-column-flextable.av-e4tadao-d0a2f51e05a9fb734299c08785691974{\nmargin-top:0px;\nmargin-bottom:0px;\n}\n.flex_column.av-e4tadao-d0a2f51e05a9fb734299c08785691974{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-e4tadao-d0a2f51e05a9fb734299c08785691974 av_one_third  avia-builder-el-4  el_after_av_two_third  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-do38uds-5593a18e2a287ff4ea66115c872a6efa\">\n.avia-image-container.av-do38uds-5593a18e2a287ff4ea66115c872a6efa img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-do38uds-5593a18e2a287ff4ea66115c872a6efa .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-do38uds-5593a18e2a287ff4ea66115c872a6efa av-styling- avia-align-center  avia-builder-el-5  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-69734 avia-img-lazy-loading-not-69734 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/patchwork-PVD.png\" alt='' title='patchwork-PVD'  height=\"921\" width=\"662\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/patchwork-PVD.png 662w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/patchwork-PVD-216x300.png 216w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/patchwork-PVD-9x12.png 9w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/patchwork-PVD-507x705.png 507w\" sizes=\"(max-width: 662px) 100vw, 662px\" \/><\/div><\/div><\/div><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div  class='flex_column av-uvkipm-bef1ac4c852650005ba1cd4d05089c40 av_one_full  avia-builder-el-6  el_after_av_one_third  el_before_av_one_full  first flex_column_div  column-top-margin'     ><section  class='av_textblock_section av-lz6ttcyh-28e8eb8cfcb4c0639df6179859540306'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Gr\u00e2ce au CPER IMITECH et \u00e0 l\u2019EQUIPEX+ NANOFUTUR, l\u2019activit\u00e9 PVD du p\u00f4le s\u2019est renforc\u00e9e avec une nouvelle machine de pulv\u00e9risation cathodique magn\u00e9tron de 12 cathodes \u00e9quip\u00e9e de g\u00e9n\u00e9rateurs HIPIMS, DC puls\u00e9 et RF.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-zx5q7u-93c75d45b3d019cce6e62304ca0f09af\">\n.flex_column.av-zx5q7u-93c75d45b3d019cce6e62304ca0f09af{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-zx5q7u-93c75d45b3d019cce6e62304ca0f09af av_one_full  avia-builder-el-8  el_after_av_one_full  el_before_av_textblock  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jou5atmc-1c244af0286a2f8ec8f5c962ed4feca1\">\n#top .av-special-heading.av-jou5atmc-1c244af0286a2f8ec8f5c962ed4feca1{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jou5atmc-1c244af0286a2f8ec8f5c962ed4feca1 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jou5atmc-1c244af0286a2f8ec8f5c962ed4feca1 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jou5atmc-1c244af0286a2f8ec8f5c962ed4feca1 av-special-heading-h4  avia-builder-el-9  avia-builder-el-no-sibling'><h4 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise, savoir-faire<\/h4><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n<section  class='av_textblock_section av-lz6syxi2-3e1f7130d8210ec596c83dbcee6e1b04'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>L\u2019\u00e9vaporation<\/strong> est r\u00e9alis\u00e9e avec un canon \u00e0 \u00e9lectrons (PLASSYS MEB 550SL + 2 MEB 550S \u00e0 4 satellites) ou par effet joule (PLASSYS MEB 450S) sur une large gamme de m\u00e9taux\u00a0: Au, Ti, Ge, Al, Pt, Ni, Mo, Cr, Pd, Ag et In. Les options permettent de d\u00e9poser en rotation plan\u00e9taire pour am\u00e9liorer l\u2019uniformit\u00e9, sous angle pour assurer la continuit\u00e9 de d\u00e9p\u00f4t sur des marches et d\u2019effectuer des d\u00e9capages \u00e0 l\u2019Ar pour am\u00e9liorer l\u2019adh\u00e9rence ou graver de tr\u00e8s fines couches (quelques nm). Selon les \u00e9quipements, les d\u00e9p\u00f4ts sont possibles sur des \u00e9chantillons allant du morceau jusqu\u2019\u00e0 150mm.<\/p>\n<p><strong>La pulv\u00e9risation cathodique magn\u00e9tron<\/strong> est disponible sur 7 chambres de d\u00e9p\u00f4t (ALLIANCE CONCEPT 2 DP650 + cluster CT200 3 chambres, ELETTRORAVA et LEYBOLD Z550 (contact N. Tiercelin)).\u00a0 Sur l\u2019ensemble de notre parc, nous disposons d\u2019une trentaine de cathodes planaires ou confocales du 50mm au 100mm, de gaz Ar, N2 et O2 pour les m\u00e9langes r\u00e9actifs, de g\u00e9n\u00e9rateurs HIPIMS, DC puls\u00e9 et RF utilisables \u00e9galement en copulv\u00e9risation, de postes froids et chauds (450\u00b0C, 600\u00b0C et 800\u00b0C). Nous pouvons d\u00e9poser sur des \u00e9chantillons allant du morceau jusqu\u2019\u00e0 jusqu\u2019\u00e0 100mm et nous poss\u00e9dons une centaine de cibles. Les mat\u00e9riaux d\u00e9pos\u00e9s sont\u00a0: Au, Al, Bi, Ti, Cr, Ni, W, Cu, Pt, Mo, TiN, VN, WN, RuN, TaN, Ta2O5, TiO2, Nb2O5, ITO\u2026 et des couches magn\u00e9tiques telles que TbFe2, TbCo2, TbFeCo, FeCo, Fe, CoPt, FePt \u2026<\/p>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-th2ym2-957df4370d9a629918495b4bb5360166\">\n.flex_column.av-th2ym2-957df4370d9a629918495b4bb5360166{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-th2ym2-957df4370d9a629918495b4bb5360166 av_one_full  avia-builder-el-11  el_after_av_textblock  el_before_av_two_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lz6t70jf-547291da569a154186889619828ff344\">\n#top .av-special-heading.av-lz6t70jf-547291da569a154186889619828ff344{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-lz6t70jf-547291da569a154186889619828ff344 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-lz6t70jf-547291da569a154186889619828ff344 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-lz6t70jf-547291da569a154186889619828ff344 av-special-heading-h4  avia-builder-el-12  avia-builder-el-no-sibling'><h4 class='av-special-heading-tag'  itemprop=\"headline\"  >some examples<\/h4><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div><div class='flex_column_table av-1u5boka-b15e172837ae37deac8b1dd7f07e0dfb sc-av_two_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1u5boka-b15e172837ae37deac8b1dd7f07e0dfb\">\n.flex_column.av-1u5boka-b15e172837ae37deac8b1dd7f07e0dfb{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1u5boka-b15e172837ae37deac8b1dd7f07e0dfb av_two_fifth  avia-builder-el-13  el_after_av_one_full  el_before_av_two_fifth  first no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jou4pnq2-304d5aa9386fbb09f34d46078ef7d000'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>\u2013 Film de RuN, de structure nanoplume, utilis\u00e9 comme \u00e9lectrode dans les microsupercondensateurs. CV mesur\u00e9e \u00e0 50mV\/s dans un \u00e9lectrolyte aqueux.<\/p>\n<\/div><\/section><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3jh4wq-c66d242f9ea4754e4b3f940601fc64ca\">\n.flex_column.av-3jh4wq-c66d242f9ea4754e4b3f940601fc64ca{\nborder-radius:0px 0px 0px 0px;\npadding:10px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3jh4wq-c66d242f9ea4754e4b3f940601fc64ca av_two_fifth  avia-builder-el-15  el_after_av_two_fifth  el_before_av_one_fifth  no_margin flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jou4vgii-c9434b202df0e52a46950fb12d606c6c\">\n.avia-image-container.av-jou4vgii-c9434b202df0e52a46950fb12d606c6c img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jou4vgii-c9434b202df0e52a46950fb12d606c6c .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jou4vgii-c9434b202df0e52a46950fb12d606c6c av-styling- av-img-linked avia-align-center  avia-builder-el-16  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD.png 188w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD-138x300.png 138w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD-6x12.png 6w\" data-sizes=\"(max-width: 188px) 100vw, 188px\" class='avia_image'  aria-label='film RuN_d\u00e9p\u00f4t PVD'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-69737 avia-img-lazy-loading-not-69737 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD-138x300.png\" alt='' title='film RuN_d\u00e9p\u00f4t PVD'  height=\"300\" width=\"138\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD-138x300.png 138w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD-6x12.png 6w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/film-RuN_PVD.png 188w\" sizes=\"(max-width: 138px) 100vw, 138px\" \/><\/a><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tjgp16-53246412343839f103b22b8ca012c78d\">\n.flex_column.av-tjgp16-53246412343839f103b22b8ca012c78d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-tjgp16-53246412343839f103b22b8ca012c78d av_one_fifth  avia-builder-el-17  el_after_av_two_fifth  el_before_av_two_fifth  no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jou4qywk-e43c3aa8c4186433871a3d4625980e1f\">\n#top .av_textblock_section.av-jou4qywk-e43c3aa8c4186433871a3d4625980e1f .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-jou4qywk-e43c3aa8c4186433871a3d4625980e1f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>1<\/i><i>. <\/i><em>Groupe CSAM, membre du RS2E, collaboration entre le CNRS, les universit\u00e9s de Lille, Nantes, Toulouse et de Califronie, et, le synchrotron Soleil. <a href=\"https:\/\/hal.univ-lille.fr\/hal-04495652\">Nature materials 2024<\/a>. Contact : C. Lethien<\/em><\/p>\n<p><i>\u00a0<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-1rxlqnu-3337a5439b0924cddbae5dea2ac95593 sc-av_two_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1rxlqnu-3337a5439b0924cddbae5dea2ac95593\">\n.flex_column.av-1rxlqnu-3337a5439b0924cddbae5dea2ac95593{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1rxlqnu-3337a5439b0924cddbae5dea2ac95593 av_two_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_two_fifth  first no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-lz6te4q3-c86e3fd831e5bc9998853ec5c4704be1'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>\u2013 Microcondensateurs \u00e9lectrolytiques \u00e0 base de Tantale pour des applications \u00e0 haute tension. <em>Une \u00e9tude comparative de deux empilements (Ta \/ Ta2O5 et TaN \/ Ta2O5) d\u2019\u00e9paisseurs similaires (45 \/ 25 nm) agissant comme \u00e9lectrode de micro-condensateur \u00e9lectrolytique dans un \u00e9lectrolyte aqueux H2SO4 0,5M. <\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-138pkhm-2375f7b3f9753a3f3c1b3e5bfaaf0a20\">\n.flex_column.av-138pkhm-2375f7b3f9753a3f3c1b3e5bfaaf0a20{\nborder-radius:0px 0px 0px 0px;\npadding:10px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-138pkhm-2375f7b3f9753a3f3c1b3e5bfaaf0a20 av_two_fifth  avia-builder-el-21  el_after_av_two_fifth  el_before_av_one_fifth  no_margin flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lz6thvzx-303c7d6be5e311100d9f90c6e1e794b7\">\n.avia-image-container.av-lz6thvzx-303c7d6be5e311100d9f90c6e1e794b7 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lz6thvzx-303c7d6be5e311100d9f90c6e1e794b7 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lz6thvzx-303c7d6be5e311100d9f90c6e1e794b7 av-styling- av-img-linked avia-align-center  avia-builder-el-22  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-1030x294.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-1030x294.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-300x86.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-768x219.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-18x5.png 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-705x201.png 705w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques.png 1384w\" data-sizes=\"(max-width: 1030px) 100vw, 1030px\" class='avia_image'  aria-label='microcondensateurs \u00e9lectrolytiques'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-69739 avia-img-lazy-loading-not-69739 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-300x86.png\" alt='' title='microcondensateurs \u00e9lectrolytiques'  height=\"86\" width=\"300\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-300x86.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-1030x294.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-768x219.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-18x5.png 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques-705x201.png 705w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/07\/microcondensateurs-electrolytiques.png 1384w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/a><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jfbzga-0ff1d2b4188d692ec9bf2d2f56e5c901\">\n.flex_column.av-jfbzga-0ff1d2b4188d692ec9bf2d2f56e5c901{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-jfbzga-0ff1d2b4188d692ec9bf2d2f56e5c901 av_one_fifth  avia-builder-el-23  el_after_av_two_fifth  el_before_av_three_fifth  no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lz6tet9t-6db50b5012e87ceb700bbe54caae7d99\">\n#top .av_textblock_section.av-lz6tet9t-6db50b5012e87ceb700bbe54caae7d99 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-lz6tet9t-6db50b5012e87ceb700bbe54caae7d99'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>1<\/i><i>. <\/i><em>Groupe CSAM, membre du RS2E, collaboration entre le CNRS et l\u2019universit\u00e9 de Lille, Advanced materials 2024. Contact : C. Lethien<\/em><\/p>\n<p><i>\u00a0<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-bcxn7lc-471d62ff21d9fd01367d02eb2bf71d4e sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-bcxn7lc-471d62ff21d9fd01367d02eb2bf71d4e\">\n.flex_column.av-bcxn7lc-471d62ff21d9fd01367d02eb2bf71d4e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-bcxn7lc-471d62ff21d9fd01367d02eb2bf71d4e av_three_fifth  avia-builder-el-25  el_after_av_one_fifth  el_before_av_one_fifth  first no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-as40btc-c63138fcdbe75783ec60df81b0b19b02'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>- Magnetic layer deposition by sputtering<\/p>\n<p>Two sputtering frames are used for the deposition of metallic magnetic layers: A Leybold Z550 (RF, DC) and the Alliance Concept CT200 cluster chamber 1 (RF, DC, DC-pulse). The main materials deposited are transition metals (Fe, Co), alloys with rare earths (Tb, Sm, Gd) and combinations with non-magnetic buffers (Cu, Ru, Pt...). A particular know-how exists on the deposition of nanostructured magnetostrictive layers of type Nx[TbCo.<sub>2 (x nm)<\/sub>\/FeCo <sub>(y nm)<\/sub>. with controlled magnetic anisotropy. These stacks are used for applications such as magnetization control by magnetoelectric effect or coupling with surface acoustic waves.<strong><br \/>\n<\/strong><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-aho7is0-cf9a93b57e803e1d3ee2538f534d9c3d\">\n.flex_column.av-aho7is0-cf9a93b57e803e1d3ee2538f534d9c3d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-aho7is0-cf9a93b57e803e1d3ee2538f534d9c3d av_one_fifth  avia-builder-el-27  el_after_av_three_fifth  el_before_av_one_fifth  no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9rrwuls-788187cc6f1d248682fe64950b0e1e78\">\n.avia-image-container.av-9rrwuls-788187cc6f1d248682fe64950b0e1e78 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-9rrwuls-788187cc6f1d248682fe64950b0e1e78 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-9rrwuls-788187cc6f1d248682fe64950b0e1e78 av-styling- av-img-linked avia-align-center  avia-builder-el-28  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin.png 865w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-300x224.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-768x574.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-705x527.png 705w\" data-sizes=\"(max-width: 865px) 100vw, 865px\" class='avia_image'  aria-label='CMNF depots physiques'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-33891 avia-img-lazy-loading-not-33891 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-80x80.png\" alt='' title='CMNF depots physiques'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/02\/depots-physiques-nicolas-tiercelin-180x180.png 180w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-99vh9f4-7403885c6e288a547d4b6570aadcc95d\">\n.flex_column.av-99vh9f4-7403885c6e288a547d4b6570aadcc95d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-99vh9f4-7403885c6e288a547d4b6570aadcc95d av_one_fifth  avia-builder-el-29  el_after_av_one_fifth  el_before_av_one_full  no_margin flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8scx2mo-8f331635efd9244396876193cd47cb63\">\n#top .av_textblock_section.av-8scx2mo-8f331635efd9244396876193cd47cb63 .avia_textblock{\nfont-size:10px;\n}\n<\/style>\n<section  class='av_textblock_section av-8scx2mo-8f331635efd9244396876193cd47cb63'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>1. <\/em><em>Exemple de multicouche magn\u00e9to-\u00e9lastique utilis\u00e9e dans un capteur <\/em><em>de champ magn\u00e9tique \u00e0 ondes acoustiques de surface (SAW). Contact N. Tiercelin groupe Aiman-films<br \/>\n<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-8kqe3lc-5b7f4e9b8911f26b0f00c0d4650a4c6a sc-av_one_full av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8kqe3lc-5b7f4e9b8911f26b0f00c0d4650a4c6a\">\n.flex_column.av-8kqe3lc-5b7f4e9b8911f26b0f00c0d4650a4c6a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-8kqe3lc-5b7f4e9b8911f26b0f00c0d4650a4c6a av_one_full  avia-builder-el-31  el_after_av_one_fifth  el_before_av_one_full  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-7v8k9f4-38fc47fa4e70bd97937ced8b60cebc6e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>- Electrochemical energy (micro) storage: materials for all-solid state lithium ion micro-batteries and micro-supercapacitors (thickness range 0.1 to 20 \u00b5m depending on the application). In the field of lithium ion micro-batteries, IEMN (CSAM group) has a recognized expertise on:<\/p>\n<ul>\n<li>Titanium nitride lithium diffusion barrier deposit (TiN, bati Alliance concept 4 \" DP650, Journal of the Electrochemical Society 2015)<\/li>\n<li>la mise au point d&rsquo;\u00e9lectrolyte solide de type LiPON (&gt; 1 \u00b5m, cluster CT 200, Material Chemistry and Physics 2010)<\/li>\n<li class=\"translation-block\">the development of high potential positive electrode in LiFePO4\/C and LiMn1.5Ni0.5O4 (&lt; 10 \u00b5m, cluster CT 200, Chem mat 2017 &amp; ESM 2018)<\/li>\n<li>la mise au point d&rsquo;\u00e9lectrode n\u00e9gative en Nb2O5 (&lt; 3 \u00b5m, cluster CT 200)<\/li>\n<\/ul>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-l96ifk-bc4634b532ed2e714d5b7946d1a592e1 sc-av_one_full av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-l96ifk-bc4634b532ed2e714d5b7946d1a592e1\">\n.flex_column.av-l96ifk-bc4634b532ed2e714d5b7946d1a592e1{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-l96ifk-bc4634b532ed2e714d5b7946d1a592e1 av_one_full  avia-builder-el-33  el_after_av_one_full  el_before_av_one_full  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-54waez4-693f22f403dcf323143f4689412c65e8'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>-micro-supercapacitor (CSAM group), the know-how is based on:<\/p>\n<ul>\n<li class=\"translation-block\">the development of metal carbide (TiC, &lt; 20 \u00b5m, cluster CT 200, Science 2016, Electrochemica acta 2016, Journal of power sources 2016 &amp; AFM 2017) for carbon\/carbon micro-supercapacitors<\/li>\n<li class=\"translation-block\">the development of VN or WN transition metal nitride (&lt; 10 \u00b5m, Cluster CT 200, Advanced Materials Technologies 2018) as pseudocapacitive electrode)<\/li>\n<\/ul>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ks18qi-85bbb74e39636ecbfdde90db5eddbeae\">\n.flex_column.av-ks18qi-85bbb74e39636ecbfdde90db5eddbeae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-ks18qi-85bbb74e39636ecbfdde90db5eddbeae av_one_full  avia-builder-el-35  el_after_av_one_full  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-om5t2y-1-f312a6a5ba8babd831bdc358cb6d8de3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<h4>Contact: J\u00e9r\u00e9mie Chaillou, Marc Dewitte, Carlos Moncasi-Luque, Isabelle Roch-Jeune \u2013 P\u00f4le d\u00e9p\u00f4t<br \/>\nContact Leybold Z550\u00a0: Nicolas Tiercelin \u2013 Groupe AIMAN-FILMS<\/h4>\n<\/blockquote>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":10722,"menu_order":10,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10746","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10746","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10746"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10746\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10722"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10746"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}