{"id":10742,"date":"2016-04-26T15:23:23","date_gmt":"2016-04-26T13:23:23","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/depots-couches-minces\/chemical-depositions"},"modified":"2025-09-18T10:57:29","modified_gmt":"2025-09-18T08:57:29","slug":"chemical-depositions","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/depots-couches-minces\/chemical-depositions","title":{"rendered":"Chemical Vapour Deposition (CVD)"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_991398nvgvz2\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" 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id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-10742'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-pembsm-9873b58aa5993a186cdd6000ffd170e9\">\n#top .av-special-heading.av-pembsm-9873b58aa5993a186cdd6000ffd170e9{\npadding-bottom:20px;\n}\nbody .av-special-heading.av-pembsm-9873b58aa5993a186cdd6000ffd170e9 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-pembsm-9873b58aa5993a186cdd6000ffd170e9 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-pembsm-9873b58aa5993a186cdd6000ffd170e9 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_third  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >D\u00e9p\u00f4ts chimiques en phave vapeur (CVD)<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-qmm9ee-8e1f606d412d9525434708f2880a0b3d\">\n.flex_column.av-qmm9ee-8e1f606d412d9525434708f2880a0b3d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-qmm9ee-8e1f606d412d9525434708f2880a0b3d av_one_third  avia-builder-el-2  el_after_av_heading  el_before_av_two_third  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-d6z3cye-ca0aa62d186b072fb679e6177f20e723'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-66315\" style=\"display: block; margin-left: auto; margin-right: auto;\" src=\"..\/wp-content\/uploads\/2024\/06\/depots-chimiques.png\" alt=\"\" width=\"402\" height=\"383\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/depots-chimiques.png 402w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/depots-chimiques-300x286.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/depots-chimiques-13x12.png 13w\" sizes=\"auto, (max-width: 402px) 100vw, 402px\" \/><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1plpriu-ba5b7c7fab7a2b8a968d92682dbb7a20\">\n.flex_column.av-1plpriu-ba5b7c7fab7a2b8a968d92682dbb7a20{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1plpriu-ba5b7c7fab7a2b8a968d92682dbb7a20 av_two_third  avia-builder-el-4  el_after_av_one_third  el_before_av_textblock  flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-joo67lk3-b5cd2ba55d53c02d7aaec1b8b4700d86'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>La centrale s\u2019appuie sur une large gamme de techniques de d\u00e9p\u00f4t chimique en phase vapeur comme les d\u00e9p\u00f4ts assist\u00e9s par plasma (PECVD), en couches atomiques conformes (ALD), \u00e0 basse pression (LPCVD), l\u2019oxydation thermique (APCVD) et la pyrolyse pour proposer des isolants de haute densit\u00e9, des isolants organiques utilis\u00e9s aussi pour l\u2019encapsulation, des couches barri\u00e8re ou de passivation, des couches sacrificielles, des semiconducteurs, des m\u00e9taux et nitrures de transition pour \u00e9lectrodes.\u00a0Les caract\u00e9ristiques et propri\u00e9t\u00e9s de ces mat\u00e9riaux sont utilis\u00e9es dans les domaines suivants\u00a0:<\/p>\n<p>-La micro\u00e9lectronique et les MEMS\/NEMS sur Si<\/p>\n<p>-Les fili\u00e8res III\/V et GaN en micro et nano\u00e9lectronique, opto\u00e9lectronique, photonique THz et NEMS<\/p>\n<p>-Le microstockage de l\u2019\u00e9nergie<\/p>\n<p>-L\u2019\u00e9lectronique organique<\/p>\n<p>-Les microsyst\u00e8mes bioinspir\u00e9s<\/p>\n<\/div><\/section><\/div>\n<section  class='av_textblock_section av-lz6x764j-89b76d8703bf2b6e2067cf5ea558eb96'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Mat\u00e9riaux d\u00e9velopp\u00e9s\u00a0: SiO2 thermique sec et humide, LTO, Si3N4 et SixNy faiblement contraint LPCVD, PolySi LPCVD, SiO2 et Si3N4 PECVD, paryl\u00e8ne. Par ALD\u00a0: Al203 thermique, plasma et ozone, ZNO, NiO, Pt, et des mat\u00e9riaux Lithi\u00e9s.<\/p>\n<p>Gr\u00e2ce au CPER IMITECH et \u00e0 l\u2019EQUIPEX+ NANOFUTUR, l\u2019activit\u00e9 CVD du p\u00f4le s\u2019est renforc\u00e9e avec de 2 \u00e9quipements suppl\u00e9mentaires\u00a0: une nouvelle machine ALD connect\u00e9e \u00e0 une bo\u00eete \u00e0 gants sous azote, une nouvelle machine PECVD avec un module TEOS.<\/p>\n<p>Mat\u00e9riaux en cours de d\u00e9veloppement\u00a0: a-Si:H PECVD, SiO2 TEOS PECVD, Si3N4 sans ammoniaque PECVD. Par ALD\u00a0: TiO2, TaN, Ta2O5.<\/p>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-u0b9g6-ccd49a41126d40d841fc95913828a812\">\n.flex_column.av-u0b9g6-ccd49a41126d40d841fc95913828a812{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-u0b9g6-ccd49a41126d40d841fc95913828a812 av_one_full  avia-builder-el-7  el_after_av_textblock  el_before_av_one_full  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jlgm23ui-f0115910f7c593dd413e73e8fd04e7f9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4><strong>Expertises, savoir-faire\u00a0et faits marquants\u00a0<\/strong><\/h4>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-milweu-1d39213e90502f51a659fc856c5a666a\">\n.flex_column.av-milweu-1d39213e90502f51a659fc856c5a666a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-milweu-1d39213e90502f51a659fc856c5a666a av_one_full  avia-builder-el-9  el_after_av_one_full  el_before_av_one_full  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-lz6ukk1v-1a79085b5868ceb57a29f5adad32d0d4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>Le d\u00e9p\u00f4t par couches atomiques (ALD)<\/strong><\/p>\n<p>Ce cas particulier de d\u00e9p\u00f4t chimique en phase vapeur (CVD), est une technique de d\u00e9p\u00f4t en phase gazeuse utilis\u00e9e pour d\u00e9poser des couches minces de quelques nanom\u00e8tres \u00e0 des centaines de nanom\u00e8tres. Gr\u00e2ce au caract\u00e8re limitant en surface et auto-terminant des r\u00e9actions ALD, il est possible d\u2019obtenir des couches minces conformes sur des substrats nano structur\u00e9s avec un rapport d\u2019aspect \u00e9lev\u00e9. L\u2019IEMN dispose de deux machines ALD PICOSUN chacune connect\u00e9e \u00e0 sa propre bo\u00eete \u00e0 gants sous atmosph\u00e8re d\u2019azote ou d\u2019argon, pouvant d\u00e9poser sur des substrats jusqu\u2019au 200mm et jusqu\u2019\u00e0 550\u00b0C. Le r\u00e9acteur le plus r\u00e9cent est \u00e9quip\u00e9 d\u2019un ellipsom\u00e8tre pour les mesures in situ. Les deux machines sont \u00e9quip\u00e9es pour effectuer des d\u00e9p\u00f4ts thermiques, assist\u00e9s d\u2019un plasma ou avec un ozoneur. Nous pouvons d\u00e9poser plus d\u2019une dizaine de mat\u00e9riaux diff\u00e9rents.<\/p>\n<p><strong>Les d\u00e9p\u00f4ts chimiques en phase vapeur \u00e0 pression atmosph\u00e9rique et \u00e0 basse pression<\/strong> <strong>(AP\/LPCVD)<\/strong><\/p>\n<p>5 tubes Tempress sont utilis\u00e9s pour les couches minces uniformes dans une gamme de temp\u00e9rature allant de 420\u00b0C jusqu\u2019\u00e0 1100\u00b0C, sur des substrats jusqu\u2019au 100mm. Ils permettent de r\u00e9aliser des oxydes de silicium thermiques secs ou humides de haute densit\u00e9 (2 nm-1,5\u00b5m), des couches de polysilicium jusqu\u2019\u00e0 2\u00b5m, des oxydes basse temp\u00e9rature jusqu\u2019\u00e0 5\u00b5m, des nitrures de silicium st\u0153chiom\u00e9triques ou \u00e0 faibles contraintes jusqu\u2019\u00e0 1 \u00b5m.<\/p>\n<p><strong>Les d\u00e9p\u00f4ts chimiques en phase vapeur assist\u00e9s par plasma<\/strong> <strong>(PECVD)<\/strong><\/p>\n<p>Les b\u00e2tis Oxford Plasmalab80+, DELTA_LPX SPTS\/KLA sont utilis\u00e9s pour d\u00e9poser des couches minces uniformes \u00e0 basse temp\u00e9rature (80-340\u00b0C) sur des substrats jusqu\u2019au 150mm. Nous pouvons d\u00e9poser des oxydes et nitrures de silicium de quelques nm jusqu\u2019\u00e0 2\u00b5m, du SiO2 TEOS avec une conformalit\u00e9 am\u00e9lior\u00e9e en couche \u00e9paisse (&gt;4 \u00b5m) et du silicium amorphe hydrog\u00e9n\u00e9. Les contraintes des films peuvent \u00eatre contr\u00f4l\u00e9es en ajustant la haute et basse fr\u00e9quence.<\/p>\n<p><strong>D\u00e9p\u00f4t par pyrolyse<\/strong><\/p>\n<p>R\u00e9alisations dans un B\u00e2ti Comelec de paryl\u00e8ne C et N en couche mince d\u2019environ 50nm \u00e0 25\u00b5m (avec ou sans promoteur d\u2019adh\u00e9rence). Le paryl\u00e8ne est notamment utilis\u00e9 pour sa grande inertie chimique (encapsulation de composant) et son caract\u00e8re isolant \u00e9lectrique.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-35giet2-9683475c35a09d77f144ae96c1c8b0b4\">\n.flex_column.av-35giet2-9683475c35a09d77f144ae96c1c8b0b4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-35giet2-9683475c35a09d77f144ae96c1c8b0b4 av_one_full  avia-builder-el-11  el_after_av_one_full  el_before_av_three_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-lz6x5mfv-b2f2008302203b4978f0a4ef07f51754'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h6>Exemples de savoir-faire:<\/h6>\n<\/div><\/section><\/div>\n<div class='flex_column_table av-9h6xl4m-ebff3ef56125d7d29d035d61112afca2 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9h6xl4m-ebff3ef56125d7d29d035d61112afca2\">\n.flex_column.av-9h6xl4m-ebff3ef56125d7d29d035d61112afca2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-9h6xl4m-ebff3ef56125d7d29d035d61112afca2 av_three_fifth  avia-builder-el-13  el_after_av_one_full  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-90bw0qe-57d3405875940bd0ff3b1d0acc16c350'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><strong>D\u00e9p\u00f4t par couches atomiques (ALD)<\/strong><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8kjjmnq-f84282f1220564e823d9db2f72c06019\">\n.flex_column.av-8kjjmnq-f84282f1220564e823d9db2f72c06019{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-8kjjmnq-f84282f1220564e823d9db2f72c06019 av_one_fifth  avia-builder-el-15  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-88gg1rq-fe8f61e45bde80dbf13182330a7fc9ed\">\n.avia-image-container.av-88gg1rq-fe8f61e45bde80dbf13182330a7fc9ed img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-88gg1rq-fe8f61e45bde80dbf13182330a7fc9ed .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-88gg1rq-fe8f61e45bde80dbf13182330a7fc9ed av-styling- avia-align-center  avia-builder-el-16  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/exemple-ALD-Lethien-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7mvaxue-4935f3c1405242102fd7e1ca6811d218\">\n.flex_column.av-7mvaxue-4935f3c1405242102fd7e1ca6811d218{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7mvaxue-4935f3c1405242102fd7e1ca6811d218 av_one_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6ya5ss6-7c60418fa7b6e0e03ea2dfef577c2ece\">\n#top .av_textblock_section.av-6ya5ss6-7c60418fa7b6e0e03ea2dfef577c2ece .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-6ya5ss6-7c60418fa7b6e0e03ea2dfef577c2ece'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em> \u00a0STEM images of a <\/em><em>Pt\/TiO2 <\/em><em>conformal deposition by ALD on a Si microtube (groupe CSAM in collaboration with TBrousse, IMN, RS2E). <a href=\"http:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/aenm.201301612\/abstract\">[ref]<\/a><\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-6rxarue-d9d7baaacb29b9bf1df04214362d2252 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-6rxarue-d9d7baaacb29b9bf1df04214362d2252\">\n.flex_column.av-6rxarue-d9d7baaacb29b9bf1df04214362d2252{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-6rxarue-d9d7baaacb29b9bf1df04214362d2252 av_three_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-63mgfjq-c1316b37c90fc04240c95fbc041f9661'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><strong>D\u00e9p\u00f4ts chimiques en phase vapeur assist\u00e9s par plasma<\/strong> <strong>(PECVD)<\/strong><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5ljy7zq-87a86f582288900c9e036190692856b4\">\n.flex_column.av-5ljy7zq-87a86f582288900c9e036190692856b4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5ljy7zq-87a86f582288900c9e036190692856b4 av_one_fifth  avia-builder-el-21  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-54ipqwm-e2149b83603ab454e7074cfce39b6258\">\n.avia-image-container.av-54ipqwm-e2149b83603ab454e7074cfce39b6258 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-54ipqwm-e2149b83603ab454e7074cfce39b6258 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-54ipqwm-e2149b83603ab454e7074cfce39b6258 av-styling- avia-align-center  avia-builder-el-22  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/poutres-Si3N4-contraint-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4wnsk8m-4d65226890faba1b22d37a488b3262a1\">\n.flex_column.av-4wnsk8m-4d65226890faba1b22d37a488b3262a1{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4wnsk8m-4d65226890faba1b22d37a488b3262a1 av_one_fifth  avia-builder-el-23  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4gbqq1i-32dfd703ec56ea99e2a7737f05cd2452\">\n#top .av_textblock_section.av-4gbqq1i-32dfd703ec56ea99e2a7737f05cd2452 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-4gbqq1i-32dfd703ec56ea99e2a7737f05cd2452'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>MEMs in PECVD strained silicon nitride (Groupe Nam6)<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-99y9hy-62c4ed406610f06a89333875bde6f620\">\n.flex_column.av-99y9hy-62c4ed406610f06a89333875bde6f620{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-99y9hy-62c4ed406610f06a89333875bde6f620 av_three_fifth  avia-builder-el-25  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-24q08ra-03da0c817164090a85edd7dc800fefd3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>D\u00e9p\u00f4ts de paryl\u00e8ne C<\/strong><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1l1t4om-4ff616ee84a657c4dd149670ae28433c\">\n.flex_column.av-1l1t4om-4ff616ee84a657c4dd149670ae28433c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1l1t4om-4ff616ee84a657c4dd149670ae28433c av_one_fifth  avia-builder-el-27  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18bsd06-cf4c2802703d5a7336335f7299b238eb\">\n.avia-image-container.av-18bsd06-cf4c2802703d5a7336335f7299b238eb img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-18bsd06-cf4c2802703d5a7336335f7299b238eb .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-18bsd06-cf4c2802703d5a7336335f7299b238eb av-styling- avia-align-center  avia-builder-el-28  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/OVMI_parylene-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-k01vau-b12e350c0e11a65b4cfad76d927df681\">\n.flex_column.av-k01vau-b12e350c0e11a65b4cfad76d927df681{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-k01vau-b12e350c0e11a65b4cfad76d927df681 av_one_fifth  avia-builder-el-29  el_after_av_one_fifth  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lz6x1op4-e451258622c4188ab84d20119cb55dee\">\n#top .av_textblock_section.av-lz6x1op4-e451258622c4188ab84d20119cb55dee .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-lz6x1op4-e451258622c4188ab84d20119cb55dee'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>Objet volant mimant l\u2019insecte (OVMI) r\u00e9alis\u00e9 \u00e0 partir d\u2019un film de paryl\u00e8ne C (groupe Mamina) <\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d\">\n.flex_column.av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d av_one_full  avia-builder-el-31  el_after_av_one_fifth  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-z8by9u-aeb559ed56bafc17ee029b8d251a6fa0'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<h4>Contact: <span style=\"color: #000000;\">Chiara Crivello, Carlos Moncasi-Luque, Isabelle Roch-Jeune<br \/>\n<\/span><\/h4>\n<\/blockquote>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":10722,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10742","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10742","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10742"}],"version-history":[{"count":2,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10742\/revisions"}],"predecessor-version":[{"id":75143,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10742\/revisions\/75143"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10722"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10742"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}