{"id":10665,"date":"2016-04-05T17:07:44","date_gmt":"2016-04-05T15:07:44","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/ressource-lithographie\/lithographie-electronique"},"modified":"2020-11-09T12:49:07","modified_gmt":"2020-11-09T10:49:07","slug":"lithographie-electronique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/lithographie-electronique","title":{"rendered":"Electronic Lithography"},"content":{"rendered":"<div class='flex_column_table av-av_one_fifth-20214a4b44909ebf15247997472bca96 sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-20214a4b44909ebf15247997472bca96\">\n.flex_column.av-av_one_fifth-20214a4b44909ebf15247997472bca96{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-20214a4b44909ebf15247997472bca96 av_one_fifth  avia-builder-el-0  el_before_av_two_third  avia-builder-el-first  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-0394f6c6ce549b5c900ba979fe7f2000\">\n.avia-image-container.av-av_image-0394f6c6ce549b5c900ba979fe7f2000 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-0394f6c6ce549b5c900ba979fe7f2000 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-0394f6c6ce549b5c900ba979fe7f2000 av-styling- avia-align-center  avia-builder-el-1  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/image-masqueur-180x180.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_two_third-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_two_third-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_two_third-9c1d454dc06f7247226bc4e8f931daae av_two_third  avia-builder-el-2  el_after_av_one_fifth  el_before_av_heading  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">The electron lithography area is equipped with 2 EBPG 5000plus (100kV) electronic maskers with automatic 10-position airlock, which allow resolutions of the order of 10nm. The size of the samples can go from a few mm\u00b2 to 4 inches. With more than 2000 writings per year on a wide range of applications, the team benefits from a real expertise thanks to a capitalization of the feedback. The involvement of researchers in the implementation of the resource aims to better share the expertise acquired in the field for over 20 years and to optimize its use for each field of application.<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-070b0af69bc4107ab1a6617612b95af7\">\n#top .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7{\npadding-bottom:15px;\n}\nbody .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-070b0af69bc4107ab1a6617612b95af7 av-special-heading-h6  avia-builder-el-4  el_after_av_two_third  el_before_av_three_fifth'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: some highlights<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-5  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>- High resolution and writing speed.<\/strong><b> <\/b><\/p>\n<p>Realization of dense arrays of nanoplots by ultra-fast writing methods (Dots On The Fly or Sequential). In addition to its very high writing speed (factor 80) the sequential method can offer a smoothing of the contours.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-7  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-9684eca5cf1a1cf07f78335dc5399c07\">\n.avia-image-container.av-av_image-9684eca5cf1a1cf07f78335dc5399c07 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-9684eca5cf1a1cf07f78335dc5399c07 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-9684eca5cf1a1cf07f78335dc5399c07 av-styling- avia-align-center  avia-builder-el-8  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex1-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-9  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\"><i>1. Nanoplots<\/i><i> of 10-15nm gold spaced 50nm apart on silicon, after lift-off, made by sequential method <a href=\"http:\/\/www.beilstein-journals.org\/bjnano\/single\/articleFullText.htm?publicId=2190-4286-5-202\" target=\"_self\">[Ref]<\/a><br>\n<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>- Optical resins used in electronics<\/strong><\/p>\n<p>The use of optical resins in e-beam offers a better dry etch resistance and a high aspect ratio for very deep etches up to 100\u00b5m in silicon.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-13  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-774ef355d743c9e2161a6ad1b8399105\">\n.avia-image-container.av-av_image-774ef355d743c9e2161a6ad1b8399105 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-774ef355d743c9e2161a6ad1b8399105 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-774ef355d743c9e2161a6ad1b8399105 av-styling- avia-align-center  avia-builder-el-14  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-lithographie-elec-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\"><i>2. UV210 used in <\/i><i>ebeam<\/i><i>: 500nm lines spaced at 500nm.<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>- Three-layer process<\/strong><\/p>\n<p>The use of selectively developed tri-layers of resin makes it possible to obtain the profiles necessary for the realization of T-grids.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-19  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-812000109345da8db77912d15ff95864\">\n.avia-image-container.av-av_image-812000109345da8db77912d15ff95864 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-812000109345da8db77912d15ff95864 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-812000109345da8db77912d15ff95864 av-styling- avia-align-center  avia-builder-el-20  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex3-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\"><i>3. Three-layer process, after development <\/i><i><\/i><i>and after <\/i><i>litf<\/i><i>-off <\/i><i>(<\/i><i>inset<\/i><i>) <\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-7461d47e19df4e7e27565b200b64ec09\">\n#top .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-7461d47e19df4e7e27565b200b64ec09 av-special-heading-h6  avia-builder-el-23  el_after_av_one_fifth  el_before_av_three_fifth'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: other<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-24  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>- Dilution of resins<\/p>\n<p>- Concentration of resins per <a href=\"https:\/\/www.iemn.fr\/en\/les-moyens\/plateformes\/cmnf\/ses-equipements\/modification-materiaux\/chimie\/\">distillation of solvents<\/a> to use them in e-beam<\/p>\n<p>- Use of conductive polymers to allow charges to flow onto insulating materials<\/p>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10665","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10665","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10665"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10665\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10665"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}