{"id":10665,"date":"2016-04-05T17:07:44","date_gmt":"2016-04-05T15:07:44","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/ressource-lithographie\/lithographie-electronique"},"modified":"2020-11-09T12:49:07","modified_gmt":"2020-11-09T10:49:07","slug":"lithographie-electronique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/lithographie-electronique","title":{"rendered":"Electronic Lithography"},"content":{"rendered":"<div class='flex_column_table av-av_one_fifth-20214a4b44909ebf15247997472bca96 sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-20214a4b44909ebf15247997472bca96\">\n.flex_column.av-av_one_fifth-20214a4b44909ebf15247997472bca96{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-20214a4b44909ebf15247997472bca96 av_one_fifth  avia-builder-el-0  el_before_av_two_third  avia-builder-el-first  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-0394f6c6ce549b5c900ba979fe7f2000\">\n.avia-image-container.av-av_image-0394f6c6ce549b5c900ba979fe7f2000 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-0394f6c6ce549b5c900ba979fe7f2000 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-0394f6c6ce549b5c900ba979fe7f2000 av-styling- avia-align-center  avia-builder-el-1  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/image-masqueur-180x180.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_two_third-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_two_third-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_two_third-9c1d454dc06f7247226bc4e8f931daae av_two_third  avia-builder-el-2  el_after_av_one_fifth  el_before_av_heading  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  '     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">La zone lithographie \u00e9lectronique est \u00e9quip\u00e9e de 2 masqueurs \u00e9lectroniques EBPG 5000plus (100kV) avec sas automatique 10 positions qui permettent d\u2019atteindre des r\u00e9solutions de l\u2019ordre de 10nm. La taille des \u00e9chantillons peut aller de quelques mm\u00b2 jusqu&rsquo;\u00e0 4 pouces. Avec plus de 2000 \u00e9critures par an sur un large \u00e9ventail applicatif, l\u2019\u00e9quipe b\u00e9n\u00e9ficie d\u2019une v\u00e9ritable expertise gr\u00e2ce \u00e0 une capitalisation des retours sur exp\u00e9rience. L\u2019implication des\u00a0 chercheurs dans la mise en oeuvre de la ressource vise \u00e0 mieux partager l\u2019expertise acquise dans le domaine depuis plus de 20 ans et \u00e0 optimiser son utilisation\u00a0 pour chaque domaine d\u2019applications.<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-070b0af69bc4107ab1a6617612b95af7\">\n#top .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7{\npadding-bottom:15px;\n}\nbody .av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-070b0af69bc4107ab1a6617612b95af7 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-070b0af69bc4107ab1a6617612b95af7 av-special-heading-h6  avia-builder-el-4  el_after_av_two_third  el_before_av_three_fifth '><h6 class='av-special-heading-tag '  itemprop=\"headline\"  >Expertises et savoir-faire: quelques points marquants<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-5  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; Haute r\u00e9solution et rapidit\u00e9 d&rsquo;\u00e9criture.<\/strong><b> <\/b><\/p>\n<p>R\u00e9alisation de r\u00e9seaux denses de nanoplots par des m\u00e9thodes d&rsquo;\u00e9criture ultra-rapides (Dots On The Fly ou S\u00e9quentielle). En plus de sa tr\u00e8s grande rapidit\u00e9 d&rsquo;\u00e9criture (facteur 80) la m\u00e9thode s\u00e9quentielle peut offrir un lissage des contours.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-7  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-9684eca5cf1a1cf07f78335dc5399c07\">\n.avia-image-container.av-av_image-9684eca5cf1a1cf07f78335dc5399c07 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-9684eca5cf1a1cf07f78335dc5399c07 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-9684eca5cf1a1cf07f78335dc5399c07 av-styling- avia-align-center  avia-builder-el-8  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex1-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-9  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>1. Nanoplots<\/i><i> d&rsquo;or de 10-15nm espac\u00e9s de 50nm sur silicium, apr\u00e8s lift-off, r\u00e9alis\u00e9s par m\u00e9thode s\u00e9quentielle <a href=\"http:\/\/www.beilstein-journals.org\/bjnano\/single\/articleFullText.htm?publicId=2190-4286-5-202\">[Ref]<\/a><br \/>\n<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; R\u00e9sines optiques utilis\u00e9es en \u00e9lectronique<\/strong><\/p>\n<p>L&rsquo;utilisation de r\u00e9sines optiques en e-beam offre une meilleure tenue en gravure s\u00e8che et un fort rapport d\u2019aspect pour des gravures tr\u00e8s profondes jusqu\u2019\u00e0 100\u00b5m dans le silicium.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-13  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-774ef355d743c9e2161a6ad1b8399105\">\n.avia-image-container.av-av_image-774ef355d743c9e2161a6ad1b8399105 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-774ef355d743c9e2161a6ad1b8399105 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-774ef355d743c9e2161a6ad1b8399105 av-styling- avia-align-center  avia-builder-el-14  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-lithographie-elec-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>2. UV210 utilis\u00e9e en <\/i><i>ebeam<\/i><i>: lignes de 500nm espac\u00e9es de 500nm.<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; Proc\u00e9d\u00e9 tri-couches<\/strong><\/p>\n<p>L&rsquo;utilisation de tri-couches de r\u00e9sine d\u00e9velopp\u00e9es s\u00e9lectivement permet d&rsquo;obtenir les profils n\u00e9cessaires \u00e0 la r\u00e9alisation de grilles en T.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-af835705bc58da3de813effc9f59785c\">\n.flex_column.av-av_one_fifth-af835705bc58da3de813effc9f59785c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-af835705bc58da3de813effc9f59785c av_one_fifth  avia-builder-el-19  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_image-812000109345da8db77912d15ff95864\">\n.avia-image-container.av-av_image-812000109345da8db77912d15ff95864 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-av_image-812000109345da8db77912d15ff95864 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-av_image-812000109345da8db77912d15ff95864 av-styling- avia-align-center  avia-builder-el-20  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex3-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae\">\n.flex_column.av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_fifth-9c1d454dc06f7247226bc4e8f931daae av_one_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_textblock-eb32bbd6321be4e6c172162327c69628\">\n#top .av_textblock_section.av-av_textblock-eb32bbd6321be4e6c172162327c69628 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-av_textblock-eb32bbd6321be4e6c172162327c69628 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>3. Proc\u00e9d\u00e9 tri-couche, apr\u00e8s d\u00e9veloppement\u00a0<\/i><i><\/i><i>et apr\u00e8s <\/i><i>litf<\/i><i>-off <\/i><i>(<\/i><i>inset<\/i><i>) <\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-7461d47e19df4e7e27565b200b64ec09\">\n#top .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-7461d47e19df4e7e27565b200b64ec09 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-7461d47e19df4e7e27565b200b64ec09 av-special-heading-h6  avia-builder-el-23  el_after_av_one_fifth  el_before_av_three_fifth '><h6 class='av-special-heading-tag '  itemprop=\"headline\"  >Expertises et savoir-faire: autres<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36\">\n.flex_column.av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_three_fifth-9497bbf8bff73ea4c6992cc17fa9ec36 av_three_fifth  avia-builder-el-24  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-av_textblock-0366cc7376be6c9e82a3e9cc8987b64f '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211; Dilution des r\u00e9sines<\/p>\n<p>&#8211; Concentration de r\u00e9sines par <a href=\"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/cmnf\/ses-equipements\/modification-materiaux\/chimie\">distillation de solvants<\/a> pour les utiliser en e-beam<\/p>\n<p>&#8211; Utilisation de polym\u00e8res conducteurs permettant l\u2019\u00e9coulement des charges sur mat\u00e9riaux isolants<\/p>\n<\/div><\/section><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":"","_members_access_role":[],"_members_access_error":""},"class_list":["post-10665","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10665","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10665"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10665\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10665"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}