{"id":10555,"date":"2016-05-02T21:51:17","date_gmt":"2016-05-02T19:51:17","guid":{"rendered":"https:\/\/www.iemn.fr\/les-moyens\/plateformes\/\/competences\/traitements-thermiques-et-implantation-ionique"},"modified":"2024-06-20T16:52:20","modified_gmt":"2024-06-20T14:52:20","slug":"traitements-thermiques-et-implantation-ionique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/traitements-thermiques-et-implantation-ionique","title":{"rendered":"Ion implantation"},"content":{"rendered":"<section  class='av_textblock_section av-lxk7vcmu-d4e554ff2e0ce6f3785ada74f937d11e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h3>Implantation Ionique<\/h3>\n<\/div><\/section>\n<div class='flex_column_table av-4hib7nf-50aacec04e145bfb00fe8e00af6afb00 sc-av_one_third av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4hib7nf-50aacec04e145bfb00fe8e00af6afb00\">\n#top .flex_column_table.av-equal-height-column-flextable.av-4hib7nf-50aacec04e145bfb00fe8e00af6afb00{\nmargin-top:20px;\nmargin-bottom:20px;\n}\n.flex_column.av-4hib7nf-50aacec04e145bfb00fe8e00af6afb00{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-4hib7nf-50aacec04e145bfb00fe8e00af6afb00 av_one_third  avia-builder-el-1  el_after_av_textblock  el_before_av_two_third  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-43q6p97-48b3e0eda392ba7eb535b0be759171e1\">\n.avia-image-container.av-43q6p97-48b3e0eda392ba7eb535b0be759171e1 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-43q6p97-48b3e0eda392ba7eb535b0be759171e1 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-43q6p97-48b3e0eda392ba7eb535b0be759171e1 av-styling- avia-align-center  avia-builder-el-2  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/05\/implanteur-199x300.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3blxijf-d0a8ec3eff52689662f523392239c043\">\n#top .flex_column_table.av-equal-height-column-flextable.av-3blxijf-d0a8ec3eff52689662f523392239c043{\nmargin-top:20px;\nmargin-bottom:20px;\n}\n.flex_column.av-3blxijf-d0a8ec3eff52689662f523392239c043{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3blxijf-d0a8ec3eff52689662f523392239c043 av_two_third  avia-builder-el-3  el_after_av_one_third  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-2u5mruj-02520078dd96707acc960ee0d3178a56'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">The ion implantation field is interested in the synthesis and modification of the physico-chemical and\/or structural properties of materials by ion implantation techniques with or without thermal treatments. The treatments carried out will lead to structural or chemical rearrangements which will result in modifications of the properties of the treated material. The know-how in this field includes<\/p>\n<p style=\"text-align: justify;\">-localized doping and isolation processes<\/p>\n<p style=\"text-align: justify;\">-localized synthesis of materials<\/p>\n<p style=\"text-align: justify;\">- electrical reactivation of the implanted chemical species<\/p>\n<p style=\"text-align: justify;\">- crystallization of metallic films<\/p>\n<p style=\"text-align: justify;\">- the formation of ohmic contacts<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-lxk7txsm-5750509f40cb3ffc34e385d175737a5d sc-av_three_fifth av-equal-height-column-flextable'><div  class='flex_column av-lxk7txsm-5750509f40cb3ffc34e385d175737a5d av_three_fifth  avia-builder-el-5  el_after_av_two_third  el_before_av_two_fifth  first flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><section  class='av_textblock_section av-3lsq0r-7c775767a7388fcaf4df212ff6b7bf2e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: left;\">Sample size: from 1 cm<sup>2 \u00a0<\/sup>at the usual sizes: 2, 3 and 4 inches.<\/p>\n<p style=\"text-align: left;\" class=\"translation-block\">The EATON-AXCELIS GA 3204 implanter is \"a medium-current implanter\" dedicated to <strong>localized doping<\/strong> and <strong>isolation processes.<\/strong><\/p>\n<p style=\"text-align: left;\">El\u00e9ments implant\u00e9s: As, P, Si, He, Ar, N, C, B, F. D\u2019autres \u00e9l\u00e9ments pourront \u00eatre implant\u00e9s, selon les param\u00e8tres demand\u00e9s.<\/p>\n<p style=\"text-align: left;\" class=\"translation-block\">However, we also perform \"<strong>technology support processes<\/strong>:<\/p>\n<ul style=\"text-align: left;\">\n<li class=\"translation-block\">Thus, through judicious use of different co-implants, it is possible to <em>minimize the diffusion<\/em> of implanted dopants.<\/li>\n<li class=\"translation-block\">It has been shown the feasibility through the use of high doses and proper annealing, to perform the <strong><em>localized synthesis<\/em><\/strong><strong><em> of a material like GaN from GaAs.<\/li>\n<li class=\"translation-block\">By implantation of heavy ions in a particularly \"chemically stable\" material case of superconductors, GaN... it has been observed that the <strong><em>etching<\/em><\/strong> of these, are facilitated.<\/li>\n<\/ul>\n<p style=\"text-align: left;\">Other examples are available, which makes us say that the implementation is used in our laboratory as a \"technology support tool\".<\/p>\n<h4 style=\"text-align: left;\"><\/h4>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-j3b0vv-fd913e2a28799849209a17e890251b16 av_two_fifth  avia-builder-el-7  el_after_av_three_fifth  el_before_av_two_third  flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><section  class='av_textblock_section av-2dfetgb-bf0cfd87ea35f9cf0624b3298b33fdbc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/implant_s_01.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-533 aligncenter\" title=\"L\u2019implanteur EATON-AXCELIS GA 3204\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/implant_s_01.jpg\" alt=\"L\u2019implanteur EATON-AXCELIS GA 3204\" width=\"362\" height=\"203\" \/><\/a><\/p>\n<h4 style=\"text-align: justify;\"><\/h4>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_two_third-f1f88be822a74ccd78731c222cb053c2\">\n.flex_column.av-av_two_third-f1f88be822a74ccd78731c222cb053c2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_two_third-f1f88be822a74ccd78731c222cb053c2 av_two_third  avia-builder-el-9  el_after_av_two_fifth  el_before_av_one_full  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-lxk7wcox-48d72e72ae458c0c22872b5074c331b0'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h6>Rapid heat treatments<\/h6>\n<p class=\"translation-block\">Two furnaces (Jipelec JetStar 100S furnace, Annealsys As-One furnace) allow us either to proceed to the <em>electrical reactivation<\/em> of most <em>chemical species<\/em> implanted, with a <em>partial<\/em> or <em>total<\/em><em> cure of the defects<\/em> created during the implantations; or to proceed to thermal treatments in order to carry out a precipitates growth leading to the elaboration of materials of particular structure.<\/p>\n<ul>\n<li>Temperature range: 100 to 1200\u00b0C<\/li>\n<li>Susceptors: Silicon or graphite coated with SiC<\/li>\n<li>Atmosph\u00e8re\u00a0: azote\u00a0; azote-hydrog\u00e9n\u00e9 ou\u00a0vide primaire<\/li>\n<li>Sample size: up to 6 inches<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ux17f-9e6586fd51b5cba16672c58c698c0d28\">\n#top .flex_column.av-13ux17f-9e6586fd51b5cba16672c58c698c0d28{\nmargin-top:0px;\nmargin-bottom:20px;\n}\n.flex_column.av-13ux17f-9e6586fd51b5cba16672c58c698c0d28{\nborder-radius:10px 10px 10px 10px;\npadding:0px 0px 0px 0px;\nbackground-color:#cee3ea;\n}\n.responsive #top #wrap_all .flex_column.av-13ux17f-9e6586fd51b5cba16672c58c698c0d28{\nmargin-top:0px;\nmargin-bottom:20px;\n}\n<\/style>\n<div  class='flex_column av-13ux17f-9e6586fd51b5cba16672c58c698c0d28 av_one_full  avia-builder-el-11  el_after_av_two_third  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-n7dj17-34ea321aa7628ec873e2b4dd8faf97cd'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>Contact: Laurent Fug\u00e8re, Dmitri Yarekha<\/p>\n<\/blockquote>\n<\/div><\/section><\/div><\/p>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":447,"menu_order":11,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10555","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10555","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10555"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10555\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10555"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}