{"id":10177,"date":"2016-07-26T10:39:17","date_gmt":"2016-07-26T08:39:17","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=10177"},"modified":"2024-06-20T16:53:57","modified_gmt":"2024-06-20T14:53:57","slug":"ribe","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/ribe","title":{"rendered":"Ion beam etching"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_144bukj6lm2y5\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-10177'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jl2bd609-f028e52b086e725efca50fc1d4dbafbf\">\n#top .av-special-heading.av-jl2bd609-f028e52b086e725efca50fc1d4dbafbf{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jl2bd609-f028e52b086e725efca50fc1d4dbafbf .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jl2bd609-f028e52b086e725efca50fc1d4dbafbf .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jl2bd609-f028e52b086e725efca50fc1d4dbafbf av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Ion beam etching<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<div class='flex_column_table av-lyyl0h-11ed6919c00c06bf8d99b0a8f194522e sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lyyl0h-11ed6919c00c06bf8d99b0a8f194522e\">\n.flex_column.av-lyyl0h-11ed6919c00c06bf8d99b0a8f194522e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-lyyl0h-11ed6919c00c06bf8d99b0a8f194522e av_one_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_three_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><section  class='av_textblock_section av-1q7v2sh-949aec45951fadef254df237e7b3be4a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_ionique.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-19953 aligncenter\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_ionique.jpg\" alt=\"\" width=\"313\" height=\"253\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_ionique.jpg 495w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_ionique-300x242.jpg 300w\" sizes=\"auto, (max-width: 313px) 100vw, 313px\" \/><\/a><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-ixnech-f9cc2d64b6408318999384efe1d47856 av_three_fifth  avia-builder-el-4  el_after_av_one_fifth  el_before_av_hr  flex_column_table_cell av-equal-height-column av-align-middle'     ><p><section  class='av_textblock_section av-lxk5n747-2fb95a69c9ac70707e2274278271edd3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>La gravure par faisceau d\u2019ion (IBE) d\u2019Ar permet la gravure de m\u00e9taux et de mat\u00e9riaux tr\u00e8s durs et constitue une technique tr\u00e8s adapt\u00e9e \u00e0 la gravure superficielle (&lt; 100 nm) et \u00e0 forte r\u00e9solution. Ce type de gravure couvre une gamme importante d&rsquo;activit\u00e9s de R&amp;D de l&rsquo;IEMN. En outre faisceau d\u2019Ar, le r\u00e9acteur IBE dispose de 6 conduites de gaz qui nous permettront de rajouter des ions r\u00e9actifs (RIBE) ou une composante chimique (fluore ou m\u00e9thane) et travailler en mode CAIBE (Chemical Assistant Ion Beem Etching) ce qui donne la possibilit\u00e9 d\u2019\u00e9largir la gamme de mat\u00e9riaux utiliser. La gravure par faisceaux d\u2019ion peut \u00eatre r\u00e9aliser sous diff\u00e9rents angle par rapport \u00e0 la normale de l\u2019\u00e9chantillons, ce qui permet de contr\u00f4ler l\u2019angle des motifs graver. Le recteur est \u00e9quip\u00e9 d&rsquo;un analyseur SIMS pour assurer un contr\u00f4le pr\u00e9cis des processus de gravure.<\/p>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-lxk5gavs-e194b988017232741744e7109b06cfc9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>Contact: Giuseppe Di Gioia, Dmitri Yarekha<\/p>\n<\/blockquote>\n<\/div><\/section><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><div  class='hr av-wh9esh-fa4c7bbaab6f0880e369017fa22b7789 hr-default  avia-builder-el-7  el_after_av_three_fifth  avia-builder-el-last'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":447,"menu_order":6,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-10177","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10177","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=10177"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/10177\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=10177"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}