The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.

The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.

- 3-dimensional representation with possibility of image reconstruction (stitching) on large objects (study of morphology or topography by AFM, Fogale,...)

Surface roughness measurement (RMS, Ra, ...)

- Thickness measurements of semi-transparent materials by reflectometry and ellipsometry.

In terms of observation and validation of nanometric processes in the laboratory, our scanning electron microscopes (Zeiss Ultra55/EDS Bruker, Zeiss Supra55VP/EBSD Oxford) allow us to observe and dimension devices, whose size is in the order of ten nanometers. The observation of surface or cleaved section is possible on any type of insulating materials (resins, oxides or nitrides) or conductors (Si or III/V substrates, metallizations,...). The range of acceleration voltages (200V to 30kV) allows all observations without metallization during the process.

All these tools are located in a clean room and are freely accessible after training by an engineer from the plant