The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.

The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.

- 3-dimensional representation with possibility of image reconstruction (stitching) on large objects (study of morphology or topography by AFM, Fogale,...)

Surface roughness measurement (RMS, Ra, ...)

- Thickness measurements of semi-transparent materials by reflectometry and ellipsometry.

En termes d’observation et validation des process nanométriques du laboratoire, nos microscopes électroniques à balayage ( Zeiss Ultra55/EDS Bruker, Zeiss Supra55VP/EBSD Oxford) permettent d’observer et de dimensionner des dispositifs, dont la taille est de l’ordre de la dizaine de nanomètres. L’observation de surface ou de coupe clivée est possible sur tout type de matériaux isolants (résines, oxydes ou nitrures) ou conducteurs (substrats Si ou III/V, métallisations,…). La  gamme des tensions d’accélérations (200V à 30kV) permet toutes les observations sans métallisation en cours de process.

All these tools are located in a clean room and are freely accessible after training by an engineer from the plant