Facilities

Growth and deposition of thin layer

  •     Atomic Layer Deposition ( ALD )
  •     Organic layer deposition, syntheses
  •     Metalic deposition
  •     Ionic implantation
  •     Molecular beam epitaxy
  •     Hot process LP-CVD
  •     Cold process PE-CVD

Lithography

  •     e Beam lithography
  •     Optical lithography

Etching

  •     Dry etching : Plasma
  •     Wet etching : Chemical
  •     Polishing

Caracterisation

  •     FIB
  •     SEM
  •     Optical microscopy
  •     Chemical caracterisation
  •     electrical caracterisation
  •     mechanical caracterisation
  •     Optical caracterisation
  •     physical caracterisation
  •     Packages